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Ferroelectrics Volume 408, 2010 - Issue 1
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SECTION J: PIEZOELECTRICS AND APPLICATIONS

Resonant Frequency Tuning of Piezoelectric Ultrasonic Microsensors by Bias Voltage Application to Extra Top-Electrodes on PZT Diaphragms

Kaoru Yamashita Graduate School of Science and Technology, Kyoto Institute of Technology, Matsugasaki, Kyoto, 606-8585, Japan; Graducate School of Engineering Science, Osaka University, 1–3 Machikaneyama-cho, Toyonaka, 560-8531, Japan
,
Kenji Tomiyama Graduate School of Science and Technology, Kyoto Institute of Technology, Matsugasaki, Kyoto, 606-8585, Japan
,
Keita Yoshikawa Graduate School of Science and Technology, Kyoto Institute of Technology, Matsugasaki, Kyoto, 606-8585, Japan
,
Minoru Noda Graduate School of Science and Technology, Kyoto Institute of Technology, Matsugasaki, Kyoto, 606-8585, Japan; Graducate School of Engineering Science, Osaka University, 1–3 Machikaneyama-cho, Toyonaka, 560-8531, Japan
&
Masanori Okuyama Graducate School of Engineering Science, Osaka University, 1–3 Machikaneyama-cho, Toyonaka, 560-8531, Japan
Pages 48-54 | Received 23 Aug 2009, Published online: 01 Dec 2010

References

  • Yamashita , K. , Murakami , H. , Okuayma , M. , Tanaka , T. , Mo , Y. , Tsuchitani , A. , Suzuki , Y. and Aoyagi , S. 2003 . Ultrasonic phased-array sensor using PZT thin film and three-dimensional object detection using BBD . J. Korean Phys. Soc. , 42 : S1108 – S1112 .
  • Yamashita , K. , Chansomphou , L. , Murakami , H. and Okuyama , M. 2004 . Ultrasonic micro array sensors using piezoelectric thin films and resonant frequency tuning . Sens. Actuators A Phys. , 114 : 147 – 153 .
  • Muralt , P. , Kholkin , A. , Kohli , M. and Maeder , T. 1996 . Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions . Sens. Actuators A Phys. , 53 : 398 – 404 .
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  • Yamashita , K. , Katata , H. , Okuyama , M. , Miyoshi , H. , Kato , G. , Aoyagi , S. and Suzuki , Y. 2002 . Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms . Sens. Actuators A Phys. , 97–98 : 302 – 307 .
  • Yamashita , K. , Nishimoto , H. and Okuyama , M. 2007 . Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement . Sens. Actuators A Phys. , 139 : 118 – 123 .
  • Yamashita , K. , Watanabe , T. , Yoshizaki , T. , Noda , M. and Okuyama , M. Jun. 21–25, 2009 . “ Diaphragm stress control for sensitivity improvement of piezoelectric ultrasonic microsensors on silicon dioxide diaphragms ” . In Tech. Dig. Transducers 2009 319 – 322 . Denver, , USA
  • Damjanovic , D. 1998 . Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics . Rep. Prog. Phys. , 61 : 1267 – 1324 .
  • Timoshenko , S. P. , Young , D. H. and Weaver , W. Jr . 1974 . Vibration Problems in Engineering , 4th Ed. , New York : John Wiley and Sons .

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