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Ferroelectrics Volume 410, 2010 - Issue 1
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SECTION L: MEMORY, MEMS AND OTHER INTEGRATED DEVICES

Wet Chemical Etching Process of BST Thin Films for Pyroelectric Infrared Detectors

Tianjin Zhang School of Materials Science and Engineering, Hubei University, Wuhan, 430062, Hubei, China
,
He Huang School of Materials Science and Engineering, Hubei University, Wuhan, 430062, Hubei, China
&
Ren Chen School of Materials Science and Engineering, Hubei University, Wuhan, 430062, Hubei, China
Pages 137-144 | Received 23 Aug 2009, Accepted 19 Oct 2009, Published online: 20 Jan 2011

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