126
Views
0
CrossRef citations to date
0
Altmetric
Original Articles

Imprint Behavior of Piezoelectric PZT Thin Films Deposited onto Cu-Coated Polymer Substrates

, , , , , , , , & show all
Pages 103-108 | Received 12 Aug 2010, Published online: 25 Oct 2011

References

  • Hubička , Z. , Čada , M. , Adámek , P. , Virostko , P. , Olejníček , Deyneka , A. , Jastrabík , L. , Jurek , K. , Suchaneck , G. , Guenther , M. , Gerlach , G. and Boháč , P. 2005 . Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates . Surf. Coat. Technol. , 200 : 940 – 946 .
  • Šicha , M. , Hubička , Z. , Soukup , L. , Jastrabík , L. , Čada , M. and Špatenka , P. 2001 . Low-pressure RF multi-plasma-jet system for deposition of alloy and composite thin films . Surf. Coat. Technol. , 148 : 199 – 205 .
  • Lee , J. , Ramesh , R. , Keramidas , V. G. , Warren , W. L. , Pike , G. E. and Evans , J. T. 1995 . Imprint and oxygen deficiency in (Pb,La)(Zr,Ti)O3 thin-film capacitors with La-Sr-Co-O electrodes . Appl. Phys. Lett. , 66 : 1337 – 1339 .
  • Saya , Y. , Watanabe , S. , Kawai , M. , Yamada , H. and Matsushige , K. 2000 . Investigation of nonswitching regions in ferroelectric thin films using scanning force microscopy . Jpn. J. Appl. Phys. , 39 : 3799 – 3803 .
  • Alexe , M. , Harnagea , C. , Hesse , D. and Gösele , U. 2001 . Polarization imprint and size effects in mesoscopic ferroelectric structures . Appl. Phys. Lett. , 79 : 242 – 244 .
  • Suchaneck , G. , Volkonskiy , O. , Gerlach , G. , Dejneka , A. , Hubička , Z. , Jastrabík , L. , Kiselev , D. , Bdikin , I. and Kholkin , A. 2001 . Piezoelectric PZT thin films on flexible copper-coated polymer foils . Material Science Forum , 636–637 : 392 – 397 .
  • Kholkin , A. L. , Colla , E. L. , Tagantsev , A. K. , Taylor , D. V. and Setter , N. 1996 . Fatigue of piezoelectric properties in Pb(Zr,Ti)O3 films . Appl. Phys. Lett. , 68 : 2577 – 2579 .
  • Abe , K. , Yanase , N. , Yasumoto , T. and Kawakubo , T. 2002 . Nonswitching layer model for voltage shift phenomena in heteroepitaxial barium titanate thin films . Jpn. J. Appl. Phys. , 41 : 6065 – 6071 .
  • Günther , S. , Fahland , M. , Fahlteich , J. and Schiller , N. 2007 . Vacuum web coating technologies for flexible electronics . Proc. 2007 Int. Symp. Flex. Electronics & Display (ISFED) . December 17–18 2007 , Hsinchu, Taiwan.
  • Suchaneck , G. , Hubička , Z. , Dejneka , A. , Guenther , M. , Günther , S. , Meyer , B. , Jastrabík , L. , Gerlach , G. and Schultheiss , E. 2009 . Deposition of PZT thin films on copper-coated polymer foils – challenges and perspectives . Ferroelectrics , 379 : 107 – 112 .
  • Jesche , A. , Gorbunoff , A. , Mesch , A. , Stöcker , H. , Levin , A. A. and Meyer , D. C. 2010 . Structure and giant magnetoresistance of granular Co-Cu nanolayers prepared by cross-beam pulsed laser deposition . J. Appl. Phys. , 107 : 023904
  • Suchaneck , G. , Koehler , R. , Padmini , P. , Sandner , T. , Frey , J. and Gerlach , G. 1999 . Self-polarization control of radio-frequency-sputtered lead zirconate titanate films . Surf. Coat. Technol. , 116–119 : 1238 – 1243 .
  • Roelofs , A. , Schneller , T. , Szot , K. and Waser , R. 2002 . Piezoresponse force microscopy of lead titanate nanograins possibly reaching the limit of ferroelectricity . Appl. Phys. Lett. , 81 : 5231 – 5233 .
  • Morita , T. , Kadota , Y. and Hosaka , H. 2007 . Shape memory piezoelectric actuator . Appl. Phys. Lett. , 90 : 082909

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.