Compositional and microstructural characterization of rfmagnetron-sputtered lead zirconate titanate thin films

Eric Cattan Institut Universitaire de Technologie, Université Paris Sud (XI), Plateau du moulon, BP127, ORSAY, CEDEX, 91403, FRANCE

Bernard Agius Institut Universitaire de Technologie, Université Paris Sud (XI), Plateau du moulon, BP127, ORSAY, CEDEX, 91403, FRANCE

Herve Achard LETI, Département de microélectronique, 85 X-38041, GRENOBLE, CEDEX, FRANCE

Jean-Pierre Joly LETI, Département de microélectronique, 85 X-38041, GRENOBLE, CEDEX, FRANCE

References

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Compositional and microstructural characterization of rfmagnetron-sputtered lead zirconate titanate thin films

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Compositional and microstructural characterization of rfmagnetron-sputtered lead zirconate titanate thin films

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