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Ferroelectrics Volume 152, 1994 - Issue 1
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Original Articles

Effect of electrodes on the ferroelectric properties of pulsed-laser ablation-deposited PbZrXTi1-xO3 thin film capacitors

D J. Lichtenwalner Department of Materials Science and Engineering, North Carolina State University, Raleigh, 27695, NC
,
R. Dat Department of Materials Science and Engineering, North Carolina State University, Raleigh, 27695, NC
,
O. Auciello MCNC, Center for Microelectronic Systems Technology, Research Triangle Park, NC 27709–2889
&
A. I. Kingon Department of Materials Science and Engineering, North Carolina State University, Raleigh, 27695, NC
Pages 97-102 | Received 09 Aug 1993, Published online: 25 Feb 2011

References

  • Al-Shareef , H. N. , Bellur , K. R. , Auciello , O. and Kingon , A. I. 1993 . Presented at the 5th Int. Symp. on Integrated Ferroelectrics (ISIFS) . 1993 , Colorado Springs, CO.
  • Ramesh , R. , Chan , W. K. , Wilkens , B. , Gilchrist , H. , Sands , T. , Tarascon , J. M. , Keramidas , V. G. , Fork , D. K. , Lee , J. and Safari , A. 1992 . Appl. Phys. Lett , 61 : 1537
  • Cheung , J. T. , Morgan , P. E. D. , Lowndes , D. H. , Zheng , X-Y and Breen , J. 1993 . Appl. Phys. Lett. , 62 : 2045
  • Auciello , O. , Emerick , J. , Duarte , J. and Illingworth , A. 1993 . J. Vac. Sci. Technol. A , 11 : 267
  • Auciello , O. , Mantese , L. , Duarte , J. , Chen , X. , Rou , S. H. , Kingon , A. I. , Schreiner , A. F. and Krauss , A. R. 1993 . J. Appl. Phys. , 73 : 5197
  • Lichtenwalner , D. J. , Auciello , O. , Woolcott , R. R. Jr. , Soble , C. N. II , Adu-Poku , R. , Chapman , R. , Rou , S. H. , Duarte , J. and Kingon , A. I. 1992 . J. Vac. Sci. Technol. A , 10 : 1537
  • Fenner , D. B. , Biegelsen , D. K. and Bringans , R. D. 1989 . J. Appl. Phys. , 66 : 419
  • Ramesh , R. private communication

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