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Ferroelectrics Volume 231, 1999 - Issue 1
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Session J: Processing technologies

Electrical properties of direct deposited piezoelectric thick film formed by gas deposition method annealing effect of the deposited films

Jun Akedo Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1–2 Namiki, Tsukuba, Ibaraki, 305-8564, Japan; E-mail: [email protected]
,
Noriaki Minami Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1–2 Namiki, Tsukuba, Ibaraki, 305-8564, Japan
,
Kouji Fukuda Honda Engineering Co. Ltd., 1–10–1, Shinsayama, Sayama, Saitama, 350-1381, Japan
,
Masaaki Ichiki Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1–2 Namiki, Tsukuba, Ibaraki, 305-8564, Japan
&
Ryutaro Maeda Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1–2 Namiki, Tsukuba, Ibaraki, 305-8564, Japan
Pages 285-292 | Received 08 Dec 1998, Published online: 09 Mar 2011

References

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  • Rao , N. P. 1998 . J. Aerosol Sci. , 29 ( 5/6 ) : 707
  • Akedo , J. , Ichiki , M. , Kikuchi , K. and Maeda , R. 1997 . Proceedings of Micro MAT' 97, Berlin, Germany, April , 161–8 : 614
  • Akedo , J. , Ichiki , M. and Maeda , R. August 24–27 1998 . “ Abst. ECAPD '98 ” . In Ferroelectrics , August 24–27 , Switzerland : Montreux . in printing.
  • Adachi , H. , Kuroda , Y. , Imahashi , T. and Yanagisawa , K. 1997 . Jpn. J. Appl. Phys. , 36 : 1159 PI, 3
  • Schroth , A. , Ichiki , M. , Maeda , R. , Akedo , J. and Matsumoto , S. 1998 . Jpn. J. Appl. phys. , 37 : 3167 P1–9B
  • Akedo , J. , Ichiki , M. , Kikuchi , K. and Maeda , R. 1998 . Sensors & Actuators A-Phys. , 69 : 106

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