Preparation of PVDF-TrFE layer-based bilayer composite PbTiO₃/PVDF-TrFE films for MIM capacitor

References

• R. A. Bailey and J. H. Nevin: ‘Thin-film multilayer capacitors using pyrolytically deposited silicon dioxide’, IEEE Trans. Parts, Hybrids, Packag., 1976, 12, 361–364. doi: 10.1109/TPHP.1976.1135154
   Web of Science ®Google Scholar
• D. Bao, X. Yao, N. Wakiya, K. Shinozaki and N. Mizutani: ‘Structural, dielectric, and ferroelectric properties of PbTiO3 thin films by a simple sol-gel technique’, Mater. Sci. Eng. B, 2002, 94, 269–274. doi: 10.1016/S0921-5107(02)00131-9
   Web of Science ®Google Scholar
• W. L. Chang and J. L. He: ‘Influence of the lead source materials on the microstructure and ferroelectric properties of PZT films sputter-deposited using lead and lead oxide’, J. Electroceram., 2004, 13, 35–39. doi: 10.1007/s10832-004-5072-5
   Web of Science ®Google Scholar
• J. Yang, W. S. Kim and H. Park: ‘The effect of excess Pb content on the crystallization and electrical properties in sol-gel derived Pb(Zr0.4,Ti0.6)O3 thin films’, Thin Solid Films., 2000, 377–378, 739–744. doi: 10.1016/S0040-6090(00)01325-0
   Web of Science ®Google Scholar
• H.-S. Hwang, Y. Park and W. S. Choi: ‘Electrical properties of Pb(Zr,Ti)O3 films prepared on ITO glass’, Microelectron. Eng., 2008, 85, (12), 2456–2458. doi: 10.1016/j.mee.2008.09.004
   Web of Science ®Google Scholar
• M. A. Khan, T. P. Comyn and A. J. Bell: ‘Deposition of PbTiO3 films on Pt/Si substrates using pulsed laser deposition’, J. Eur. Ceram. Soc., 2008, 28, (3), 591–597. doi: 10.1016/j.jeurceramsoc.2007.07.023
   Web of Science ®Google Scholar
• C. J. Kim, W. J. Lee and K. No: ‘Control of preferred orientation in sol-gel lead-zirconate-titanate film on Pt/Ti/glass substrate’, Thin Solid Films., 1998, 312, (1–2), 130–134. doi: 10.1016/S0040-6090(97)00725-6
   Web of Science ®Google Scholar
• D. M. Tahan and A. Safari: ‘Pure and modified lead titanate thin films by sol-gel’, ‘Applications of Ferroelectrics, 1992. IEEE Int. Symposium on Applications of Ferroelectric (ISAF) “92”, Greenville, SC, 30 August–2 September 1992, 420–423.
   Google Scholar
• H. O. Yadav: ‘Optical and electrical properties of sol-gel derived thin films of PbTiO3’, Ceram. Int., 2004, 30, 1493–1498. doi: 10.1016/j.ceramint.2003.12.133
   Web of Science ®Google Scholar
• C. H. Wang and D. J. Choi: ‘Effect of the Pb/Ti source ratio on the crystallization of PbTiO3 thin films grown by metalorganic chemical vapor deposition at low temperature of 400°C’, J. Am. Ceram. Soc., 2001, 84, 207–213. doi: 10.1111/j.1151-2916.2001.tb00632.x
   Web of Science ®Google Scholar
• M. Vellaikal and A. I. Kingon: ‘Electrical and microstructural characterization of lead titante thin films deposited by metal-organic chemical vapor deposition onto platinum and magnesium oxide’, Thin Solid Films., 1996, 287, 139–145. doi: 10.1016/S0040-6090(96)08771-8
   Web of Science ®Google Scholar
• G. L. Brennecka, J. F. Ihlefeld, J.-P. Maria, B. A. Tuttle and P. G. Clem: ‘Processing technologies for high-permittivity thin films in capacitor applications’, J. Am. Ceram. Soc., 2010, 93, (12), 3935–3954. doi: 10.1111/j.1551-2916.2010.04211.x
   Web of Science ®Google Scholar
• Y. Kobayashi, T. Tanase, T. Tabata, T. Miwa and M. Konno: ‘Fabrication and dielectric properties of the BaTiO3–polymer nano-composite thin films’, J. Eur. Ceram. Soc., 2008, 28, (1), 117–122. doi: 10.1016/j.jeurceramsoc.2007.05.007
   Web of Science ®Google Scholar
• J. J. Stroyan: ‘Processing and characterization of PVDF, PVDF-TrFE, and PVDF-TrFE-PZT composites', Master thesis, Washington State University, 2004.
   Google Scholar
• A. K. Zak, W. C. Gan, W. H. A. Majid, M. Darroudi and T. S. Velayutham: ‘Experimental and theoretical dielectric studies of PVDF/PZT nanocomposite thin films’, Ceram. Int., 2011, 37, (5), 1653–1660. doi: 10.1016/j.ceramint.2011.01.037
   Web of Science ®Google Scholar
• C.-M. Wang, M.-C. Kao and Y.-C. Chen: ‘Preparation and electrical property of P-PVDF/PbTiO3 Thin Films,’ Proc. 13th IEEE Int. Symp. on Applications of Ferroelectrics, 2002. ISAF 2002, 175–178.
   Google Scholar
• K. Kim: ‘Properties of Ferroelectric VDF-TrFE Copolymer Capacitors Directly Deposited on Si Wafers’, J. Korean Phys. Soc., 2008, 52, (1), 88–91. doi: 10.3938/jkps.52.88
   Web of Science ®Google Scholar
• Y. J. Park, H. J. Jeong, J. Chang, S. J. Kang and C. Park: ‘Recent development in polymer ferroelectric field effect transistor memory’, J. Semicond. Technol. Sci., 2008, 8, (1), 51–65. doi: 10.5573/JSTS.2008.8.1.051
   Google Scholar
• I. Bae, S. J. Kang, Y. J. Park, T. Furukawa and C. Park: ‘Organic ferroelectric field-effect transistor with P(VDF-TrFE)/PMMA blend thin films for non-volatile memory applications’, Curr. Appl. Phys., 2010, 10, (1), e54–e57. doi: 10.1016/j.cap.2009.12.013
   Web of Science ®Google Scholar
• D. Mandal: ‘Ultra-thin Films of a Ferroelectric Copolymer : P (VDF-TrFE),’ 2008 , opus4.kobv.de.
   Google Scholar
• S.-W. Jung, J.-K. Lee, Y. S. Kim, S.-M. Yoon, I.-K. You, B.-G. Yu and Y.-Y. Noh: ‘Top-gate ferroelectric thin-film-transistors with P(VDF-TrFE) copolymer’, Curr. Appl. Phys., 2010, 10, (1), e58–e61. doi: 10.1016/j.cap.2009.12.014
   Web of Science ®Google Scholar
• T. Ohno, H. Suzuki, D. Fu, M. Takahashi, T. Ota and K. Ishikawa: ‘Effect of rapid thermal annealing on residual stress in lead titanate thin film by chemical solution deposition’, Ceram. Int., 2004, 30, (7), 1487–1491. doi: 10.1016/j.ceramint.2003.12.145
   Web of Science ®Google Scholar
• A. Sidorkin, L. Nesterenko, A. Sidorkin, S. Ryabtsev and G. Bulavina: ‘Ageing and fatigue of lead titanate and lead zirconate titanate thin ferroelectric films’, Solid State Sci., 2010, 12, (3), 302–306. doi: 10.1016/j.solidstatesciences.2009.04.031
   Web of Science ®Google Scholar
• Q. X. Ji, L. H. Chang and W. A. Anderson: ‘Low leakage current thin film capacitors construction using a multilayer’, Thin Solid Films., 1995, 259, 264–269. doi: 10.1016/0040-6090(94)06445-8
   Web of Science ®Google Scholar
• S. Chopra, S. Sharma, T. Goel and R. Mendiratta: ‘Effect of annealing temperature on microstructure of chemically deposited calcium modified lead titanate thin films’, Appl. Surf. Sci., 2004, 230, (1–4), 207–214. doi: 10.1016/j.apsusc.2004.02.040
   Web of Science ®Google Scholar
• C.-M. Wang, M.-C. Kao, Y.-C. Chen and Y.-H. Lai: ‘Properties of sol-gel derived (polyvinylidene fluoride/lead titanate) pyroelectric bilayer thin films’, Jpn. J. Appl. Phys., 2003, 42, (1), 170–174. doi: 10.1143/JJAP.42.170
   Web of Science ®Google Scholar