Advanced search
Publication Cover
International Journal of Production Research Volume 40, 2002 - Issue 13
Submit an article Journal homepage
110
Views
33
CrossRef citations to date
0
Altmetric
Original Articles

SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes

Shu-Kai S. Fan
,
Bernard C. Jiang
,
Chih-Hung Jen
&
Chien-Chih Wang
Pages 3093-3120 | Published online: 14 Nov 2010

  • ADIVIKOLANU , S. and ZAFIRIOU , E. 2000 . Extensions and performance/robustness tradeoffs of the EWMA run-to-run controller by using the internal model control structure . IEEE Transactions on Electronics Packaging Manufacturing , 23 : 56 – 68 .
  • ASTROM , K. J. 1970 . Introduction to Stochastic Control Theory , New York : Academic Press .
  • ÅSTROM , K. J. and WITTENMARK , B. 1973 . On self-tuning regulators . Automatica , 9 : 185 – 199 .
  • ÅSTROM , K. J. and WITTENMARK , B. 1995 . Adaptive Control, , 2nd edn , Reading AddisonWesley .
  • ÅSTROM , K.J. and WITTENMARK , B. 1997 . Computer-controlled Systems: Theory and Design, , 3rd edn , Englewood Cliffs : Prentice Hall .
  • BONING , D. S. , MOYNE , W. P. , SMITH , T. H. , MOYNE , J. , TELFEYAN , R. , HURWITZ , A. , SHELLMAN , S. and TAYLOR , J. 1996 . Run by run control of chemical-mechanical polishing . IEEE Transactions on Components, Packaging, and Manufacturing Technology-Part C , 19 : 307 – 314 .
  • Box , G. E. P. and JENKINS , G. M. 1962 . Some statistical aspects of adaptive optimization and control . Journal of the Royal Statistical Society - Series B , 24 : 297 – 343 .
  • Box , G. E. P. and JENKINS , G. M. 1963 . Further contributions to adaptive quality control simultaneous estimation of dynamics: non-zero costs . Bulletin of the International Statistical Institute , 34 : 943 – 974 .
  • Box , G. E. P. and LUCENO , A. 1995 . Discrete proportional-integral control with constrained adjustment . Journal of the Royal Statistical Society - Series D: Statistician , 44 : 479 – 495 .
  • Box , G. E. P. and LUCENO , A. 1997 . Statistical Control - By Monitoring and Feedback Adjustment , New York : Wiley .
  • Box , G. E. P. , JENKINS , G. M. and REINSEL , G. 1994 . Time Series Analysis, Forecasting, and Control, , 3rd edn , Upper Saddle River : Prentice Hall .
  • BUTLER , S. W. and STEPANI , J. A. 1994 . Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry . IEEE Transactions on Semiconductor Manufacturing , 7 : 193 – 201 .
  • CHEN , A. and Guo , R.-S. 2001 . Age-based double EWMA controller and its application to CMP processes . IEEE Transactions on Semiconductor Manufacturing , 14 : 11 – 19 .
  • CLARKE , D. W. and GAWTHROP , P. J. 1975 . Self-tuning controller . Proceedings of the Institution of Electrical Engineers , 122 : 929 – 934 .
  • DELCASTILLO , E. 1996 . A multivariate self-tuning controller for run-to-run process control under shift and trend disturbances . HE Transactions , 28 : 1011 – 1021 .
  • DEL CASTILLO , E. 1999 . Long run and transient analysis of a double EWMA feedback controller . IIE Transactions , 31 : 1157 – 1169 .
  • DELCASTILLO , E. 2001 . Some properties of EWMA feedback quality adjustment schemes for drifting disturbances . Journal of Quality Technology , 33 : 153 – 166 .
  • DELCASTILLO , E. and HURWITZ , A. M. 1997 . Run-to-run process control: literature review and extensions . Journal of Quality Technology , 29 : 184 – 196 .
  • DELCASTILLO , E. and YEH , J. 1998 . An adaptive run-to-run optimization controller for linear and nonlinear semiconductor processes . IEEE Transactions on Semiconductor Manufacturing , 11 : 285 – 295 .
  • HARRIS , T. J. , MACGREGOR , J. F. and WRIGHT , J. D. 1980 . Self-tuning and adaptive controllers: an application to catalytic reactor control . Technomefries , 22 : 153 – 164 .
  • INGOLFSSON , A. and SACHS , E. 1993 . Stability and sensitivity of an EWMA controller . Journal of Quality Technology , 25 : 271 – 287 .
  • KALMAN , R. E. 1958 . Design of a self-optimizing control system . Transactions of ASME , 80 : 68 – 478 .
  • LIMANOND , S. , Si , J. and TSAKALIS , K. 1998 . Monitoring and control of semiconductor manufacturing processes . IEEE Control Systems Magazine , 18 : 46 – 58 .
  • LJUNG , L. 1987 . System Identification: Theory for the User , Upper Saddle River : Prentice Hall .
  • MACGREGOR , J. F. 1990 . A different view of the funnel experiment . Journal of Quality Technology , 22 : 255 – 259 .
  • MOZUMDER , P. K. , SAXENA , S. and COLLINS , D. 1994 . A monitor wafer based controller for semiconductor processes . IEEE Transactions on Semiconductor Manufacturing , 7 : 400 – 411 .
  • PATEL , N. S. and JENKINS , S. T. 2000 . Adaptive optimization of run-to-run controllers: the EWMA example . IEEE Transactions on Semiconductor Manufacturing , 13 : 97 – 107 .
  • SACHS , E. , Hu , A. and INGOLFSSON , A. Modeling and control of an epitaxial silicon deposition process with step disturbances . IEEE/SEMI Advanced Semiconductor Manufacturing Conference Proceedings . pp. 104 – 107 .
  • SACHS , E. , Hu , A. and INGOLFSSON , A. 1995 . Run by run process control combining SPC and feedback control . IEEE Transactions on Semiconductor Manufacturing , 8 : 26 – 43 .
  • SHAH , S. L. and CLUETT , W. R. 1991 . Recursive least squares based estimation schemes for self-tuning control . Canadian Journal of Chemical Engineering , 69 : 89 – 96 .
  • SMITH , T. H. , BONING , D. S. , STEFANIE , J. and BUTLER , S. W. 1998 . Run by run advanced process control of metal sputter deposition . IEEE Transactions on Semiconductor Manufacturing , 11 : 276 – 284 .
  • WHITTENMARK , B. 1973 . A Self-Tuning Regulator. Division of Automatic Control , Report 7311 Lund Institute of Technology .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.