Data transformation in SPC for semiconductor machinery control: A case of monitoring particles

References

• Albin , SL and Friedman , DJ . 1989 . The impact of clustered defect distributions in IC fabrication . Manag. Sci. , 35 ( 9 ) : 1066 – 1078 .
   Web of Science ®Google Scholar
• Albin , SL and Friedman , DJ . 1991 . Clustered defects in IC fabrication: impact on process control charts . IEEE Trans. Semicond. Manuf. , 4 ( 1 ) : 36 – 42 .
   Google Scholar
• Box GEP Luceño A Statistical Control—By Monitoring and Feedback Adjustment 1997 Wiley New York
   Google Scholar
• Del Castillo E Statistical Process Adjustment for Quality Control 2002 Wiley New York
   Google Scholar
• Glushkovsky , EA . 1994 . ‘On-line’ G-control chart for attribute data . Qual. Reliabil. Eng. Int. , 10 : 217 – 227 .
   Web of Science ®Google Scholar
• Hansen , CK and Thyregod , P . 2000 . Analysis of integrated circuit fault data using generalized linear models . Qual. Reliabil. Eng. Int. , 16 ( 3 ) : 173 – 185 .
   Google Scholar
• Hoaglin , DC , Iglewicz , B and Tuckey , JW . 1986 . Performance of some resistant rules for outlier labeling . J. Am. Stat. Assoc. , 81 : 991 – 999 .
   Web of Science ®Google Scholar
• Jackson , JE . 1972 . All count distributions are alike . J. Qual. Tech. , 4 ( 2 ) : 86 – 92 .
   Google Scholar
• Johnson NL Kotz SI Distribution in Statistics: Continuous Univariate Distributions—1 1970 Houghton Mifflin New York
   Google Scholar
• Johnson NL Wichern D Applied Multivariate Statistical Analysis 1988 Prentice-Hall Englewood Cliffs NJ
   Google Scholar
• Johnson NL Kotz SI Kemp A Discrete Distributions 2nd edn 1992 Wiley New York
   Google Scholar
• Levinson W Polny A SPC for tool particle counts Semiconduct. Int. 1999 June 117 122
   Google Scholar
• Levinson , W , Stensney , F , Webb , R and Glahn , R . 2001 . SPC for particle counts . Semiconduct. Int. , October : 83 – 90 .
   Google Scholar
• Limanond , S , Si , J and Tsakalis , K . 1998 . Monitoring and control of semiconductor manufacturing processes . IEEE Contr. Sys. Mag. , 18 ( 6 ) : 46 – 58 .
   Google Scholar
• Lu , XS , Xie , M and Goh , TN . 1998 . Control chart for multivariate attribute processes . Int. J. Prod. Res. , 36 ( 12 ) : 3477 – 3489 .
   Web of Science ®Google Scholar
• Montgomery DC Introduction to Statistical Quality Control 4th edn 2000 Wiley New York
   Google Scholar
• Shore , H . 2000 . General control charts for attributes . IIE Trans. , 32 ( 12 ) : 1149 – 1160 .
   Web of Science ®Google Scholar
• Somerville , SE , Montgomery , DC and Runger , GC . 2002 . Filtering and smoothing methods for mixed particle count distributions . Int. J. Prod. Res. , 40 ( 13 ) : 2991 – 3013 .
   Web of Science ®Google Scholar
• Stapper , CH . 1985 . The effects of wafer to wafer density variations on integrated circuit defect and fault density . IBM J. Res. Develop. , 29 : 87 – 97 .
   Web of Science ®Google Scholar
• Stapper , CH , Armstrong , FM and Saji , K . 1983 . Integrated circuit yield statistics . Proc. IEEE , 71 : 453 – 470 .
   Web of Science ®Google Scholar
• Su , CT and Hsu , CC . 2004 . On-line tuning of single EWMA controller based on the neural technique . Int. J. Prod. Res. , 42 ( 11 ) : 2163 – 2178 .
   Web of Science ®Google Scholar
• Su , CT and Tong , LI . 1997 . A neural network-based procedure for the process monitoring of clustered defects in integrated circuit fabrication . Comput. Ind. , 34 : 285 – 294 .
   Google Scholar
• Tannock , JDT . 2003 . A fuzzy control charting method for individuals . Int. J. Prod. Res. , 41 ( 5 ) : 1017 – 1032 .
   Web of Science ®Google Scholar
• Xie , M , He , B and Goh , TN . 2001 . Zero-inflated Poisson model in statistical process control . Computat, Stat. Data Analys. , 38 : 191 – 201 .
   Web of Science ®Google Scholar