References
- Ames , VA , Gililland , J , Konopka , A and Barber , H . 1995 . “ Semiconductor Manufacturing Productivity; Overall Equipment Effectiveness (OEE) Guidelines ” . In Technology transfer #950327443 A-GEN, Revision 1.0 (Sematech)
- De Groote , P . 1995 . Maintenance performance analysis: a practical approach . J. Qual. Maint. Engng. , 1 : 4 – 24 .
- de Ron , AJ and Rooda , JE . 2005 . Equipment effectiveness: OEE revisited . IEEE Trans. Semicond. Manuf. , : 190 – 196 .
- Hopp , WJ and Spearman , ML . 2001 . Factory Physics: Foundations of Manufacturing Management, , 2nd ed. , New York : McGraw-Hill .
- Huang , SH , Dismukes , JP , Shi , J , Su , Q , Razzak , MA , Bodhale , R and Robinson , DE . 2003 . Manufacturing productivity improvement using effectiveness metrics and simulation analysis . Int. J. Prod. Res. , 41 : 513 – 527 .
- Jacobs , JH , Etman , LFP , van Campen , EJJ and Rooda , JE . 2003 . Characterization of operatinal time variability using effective process times . IEEE Trans. Semicond. Manuf. , 16 : 511 – 520 .
- Jeong , K-Y and Phillips , DT . 2001 . Operational efficiency and effectiveness measurement . Int. J. Operat. Prod. Manage. , 21 : 1404 – 1416 .
- Jonsson , P and Lesshammar , M . 1999 . Evaluation and improvement of manufacturing performance measurement systems—the role of OEE . Int. J. Operat. Prod. Manage. , 19 : 55 – 78 .
- Kaydos , W . 1999 . Operational Performance Measurement: Increasing Total Productivity , Boca Raton, FL : St. Lucie Press .
- Ljundberg , O . 1998 . Measurement of overall equipment effectiveness for TPM activities . Int. J. Operat. Prod. Manage. , 18 : 495 – 507 .
- Nakajima , S . 1988 . Introduction to TPM: Total Productive Maintenance , Cambridge, MA : Productivity Press Inc. .
- Sattler , L and Schlueter , R . Semiconductor metrics: conflicting goals or increasing opportunities . 1998 IEEE/SEMI Avanced Semiconductor Manufacturing Conference . pp. 55 – 60 .
- SEMI . 2000 . “ Standard for Definition and Measurement of Equipment Productivity ” . In SEMI E79-0200 , Mt. View, CA : Semiconductor Equipment and Material International .
- SEMI . 2001 . “ Standard for Definition and Measurement of Equipment Reliability, Availability and Maintainability ” . In SEMI E10-0701 , Mt. View, CA : Semiconductor Equipment and Material International .