362
Views
28
CrossRef citations to date
0
Altmetric
Articles

Efficient development of cycle time response surfaces using progressive simulation metamodeling

, &
Pages 3097-3109 | Received 03 Jun 2013, Accepted 31 Oct 2013, Published online: 05 Dec 2013

References

  • Backus, P., M. Janakiram, S. Mowzoon, G. C. Runger, and A. Bhargava. 2006. “Factory Cycle-time Prediction with a Data-mining Approach.” IEEE Transactions on Semiconductor Manufacturing 19 (2): 252–258.
  • Barton, R. R., and M. Meckesheimer. 2006. “Metamodel-based Simulation Optimization.” In Chapter 18, Handbooks in Operations Research and Management Science, edited by S. G. Henderson and B. L. Nelson, Vol. 13, 535–574. Amsterdam: Simulation, Elsevier.
  • Box, G. E. P., and N. R. Draper. 2007. Response Surfaces, Mixtures, and Ridge Analyses. Hoboken, NJ: Wiley.
  • Chen, T. 2008. “An Intelligent Mechanism for Lot Output Time Prediction and Achievability Evaluation in a Wafer Fab.” Computers and Industrial Engineering 54 (1): 77–94.
  • Chen, T., and Y. C. Lin. 2009. “A Fuzzy Back Propagation Network Ensemble with Example Classification for Lot Output Time Prediction in a Wafer Fab.” Applied Soft Computing 9 (2): 658–666.
  • Chien, C.-F., and C. Chen. 2007. “Using ga and ctpn for Modeling the Optimization-based Schedule Generator of a Generic Production Scheduling System.” International Journal of Production Research 45 (8): 1763–1789.
  • Chien, C.-F., C. Hsu, and C. Hsiao. 2012. “Manufacturing Intelligence to Forecast and Reduce Semiconductor Cycle Time.” Journal of Intelligent Manufacturing 23 (6): 2281–2294.
  • Chien, C.-F., C.-Y. Hsu, and K.-H. Chang. 2013. “Overall Wafer Effectiveness (OWE): A Novel Industry Standard for Semiconductor Ecosystem as a Whole.” Computers and Industrial Engineering 65: 117–127.
  • Chung, S. H., and H. W. Huang. 2002. “Cycle Time Estimation for Wafer Fab with Engineering Lots.” IIE Transactions 34 (2): 105–118.
  • Ehteshami, B., R. G. Petrakian, and P. M. Shabe. 1992. “Trade-offs in Cycle Time Management: Hot Lots.” IEEE Transactions on Semiconductor Manufacturing 5 (2): 101–106.
  • Enns, S. T. 1995. “A Dynamic Forecasting Model for Job Shop Flowing Prediction and Tardiness Control.” International Journal of Production Research 33 (5): 2817–2834.
  • Hopp, W. J., and M. L. Spearman. 2001. Factory Physics: Foundations of Manufacturing Management. 2nd ed. Chicago, IL: Irwin.
  • Huang, C.-J., K.-H. Chang, and J. T. Lin. 2012. “Optimal Vehicle Allocation for an Automated Materials Handling System using Simulation Optimisation.” International Journal of Production Research 50 (20): 5734–5746.
  • Huang, M. G., P. L. Chang, and Y. C. Chou. 2001. “Analytic Approximations for Multiserver Batch-service Workstations with Multiple Process Recipes in Semiconductor Wafer Fabrication.” IEEE Transactions on Semiconductor Manufacturing 14 (4): 395–405.
  • Kaplan, A. C., and A. T. Unal. 1993. “A Probabilistic Cost-based Due Date Assignment Model for Job Shops.” International Journal of Production Research 31 (12): 2817–2834.
  • Kuo, C., C.-F. Chien, and C. Chen. 2011. “Manufacturing Intelligence to Exploit the Value of Production and Tool Data to Reduce Cycle Tim.” IEEE Transactions on Automation Science and Engineering 8 (1): 103–111.
  • Law, A. M. 2007. Simulation Modeling and Analysis. 4th ed. Boston, MA: McGraw-Hill.
  • Liao, D. Y., and C. N. Wang. 2004. “Neural-network-based Delivery Time Estimates for Prioritized 300-mm Automatic Material Handling Operations.” IEEE Transactions on Semiconductor Manufacturing 17 (3): 324–332.
  • Montgomery, D. C. 2009. Design and Analysis of Experiments. 7th ed. New York: Wiley.
  • Morrison, J. R., and D. P. Martin. 2007. “Practical Extensions to Cycle Time Approximations for the g/g/m-queue with Applications.” IEEE Transactions on Automation Science and Engineering 4 (4): 523–532.
  • Myers, R. H., D. C. Montgomery, and C. M. Anderson-Cook. 2009. Response Surface Methodology-Process and Product Optimization Using Designed Experiments. New York: Wiley.
  • Nadarajah, S. 2007. “The Waiting Time Distribution.” Computers and Industrial Engineering 53 (4): 693–699.
  • Nadarajah, S., and S. Kots. 2008. “The Cycle Time Distribution.” International Journal of Production Research 46 (11): 3133–3141.
  • Narahari, Y., and L. M. Khan. 1997. “Modeling the Effect of Hot Lots in Semiconductor Manufacturing Systems.” IEEE Transactions on Semiconductor Manufacturing 10 (1): 185–188.
  • Pearn, W. L., S. H. Chung, and C. M. Lai. 2007. “Due-date Assignment for Wafer Fabrication under Demand Variate Environment.” IEEE Transactions on Semiconductor Manufacturing 20 (2): 165–175.
  • Shanthikumar, J. G., S. Ding, and M. T. Zhang. 2007. “Queueing Theory for Semiconductor Manufacturing Systems: A Survey and Open Problems.” IEEE Transactions on Automation Science and Engineering 4 (4): 513–522.
  • Sivakumar, A. I., and C. S. Chong. 2001. “A Simulation Based Analysis of Cycle Time Distribution, and Throughput in Semiconductor Backend Manufacturing.” Computers in Industry 45 (1): 59–78.
  • Wein, L. M. 1988. “Scheduling Semiconductor Wafer Fabrication.” IEEE Transactions on Semiconductor Manufacturing 1 (3): 115–130.
  • Yang, F., B. Ankenman, and B. L. Nelson. 2007. “Efficient Generation of Cycle Time-Throughput Curves Through Simulation and Metamodeling.” Naval Research Logistics 54 (1): 78–93.
  • Yang, F., B. Ankenman, and B. L. Nelson. 2008a. “Cycle Time Percentile Curves for Manufacturing Systems.” INFORMS Journal on Computing 20 (4): 628–643.
  • Yang, F. B. E. Ankenman,and B. L. Nelson. 2008b. “Estimating Cycle Time Percentile Curves for Manufacturing Systems Via Simulation.” 20 (4): 628–643.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.