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Original Articles

Particle removal mechanisms in cryogenic surface cleaning

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Pages 175-201 | Published online: 08 Sep 2010

References

  • Hoenig , S. A. 1986 . "Cleaning Surface with Dry Ice." . Compressed Air Magazine , 7 : 12
  • Hoenig , S. A. 1990 . "Dry Ice Snow as a Cleaning Media for Hybrids and Integrated Circuits." . Hybrid Circuit Technology , 7 : 34
  • Jackson , D. and Carver , B. 1999 . "Today's Forecast: It Looks Like Snow." . Precision Cleaning , 8 : 17 – 29 .
  • Corn , M. 1966 . "Adhesion of Particles." . J. Aerosol Science , : 359
  • Krupp , H. 1967 . "Particle Adhesion. Theory and Experiment." . Adv Colloid Interface Sci. , 1 : 111 – 140 .
  • Visser , J. 1972 . "On Hamaker Constants: A Comparison Between Hamaker Constants and Liftshitz-Van Der Waals Constants." . Adv. Colloid Interface Sci. , 3 : 331 – 363 .
  • Tabor , D. 1977 . "Surface Forces and Surface Interactions." . J. Colloid Interface Sci. , 58 : 2 – 13 .
  • Bowling , R. A. 1985 . "An Analysis of Particle Adhesion on Semiconductor Surfaces." . J. Electrochem. Soc. , 132 : 2208 – 2219 .
  • Ranade , M. B. 1987 . J. Aerosol Sci. Technol. , 7 : 161 – 176 .
  • Soltani , M. and Ahmadi , G. 1994 . "On Particle Adhesion and Removal Mechanisms in Turbulent Flows." . J. Adhesion Sci. Technol. , 8 : 763 – 785 .
  • Hamaker , H. C. 1937 . "The London-Van der Waals Attraction Between Spherical Particles." . Physica , 4 : 1059 – 1072 .
  • Lifshitz , E. M. 1956 . "The Theory of Molecular Attractive Forces Between Solids." . Soviet Phys., JETP , 2 : 73 – 83 .
  • Derjaguin , B. V. 1934 . "Untersuchungen Über Die Reibung and Adhäsion, IV" . Kolloidn. Zhur. , 69 : 155 – 164 .
  • Johnson , K. , Kendall , K. and Roberts , A. D. 1971 . "Surface Energy and Contact of Elastic Solids." . Proc. R. Soc., London , 324 : 301 – 313 .
  • Derjaguin , B. , Muller , V and Toporov , Y. 1975 . "Effect of Contact Deformations on the Adhesion of Particles." . J. Colloid Interface Sci. , 53 : 314 – 326 .
  • Muller , V. , Yushenko , V and Derjaguin , B. 1980 . "On the Influence of Molecular Forces on the Deformation of an Elastic Sphere and Its Sticking to a Rigid Plane." . J. Colloid Interface Sci. , 77 : 91 – 101 .
  • Muller , V. , Yushenko , V and Derjaguin , B. 1983 . "General Theoretical Consideration of the Influence of Surface Forces on Contact Deformations and the Reciprocal Adhesion of Elastic Spherical Particles." . J. Colloid Interface Sci. , 92 : 92 – 101 .
  • Layden , L. and Wadlow , D. 1990 . "High Velocity Carbon Dioxide for Cleaning Vacuum System Surfaces." . J. Ac. Sci. Technol. , 8 : 3881 – 3883 .
  • McDermott , W. , Ockovic , R. , Wu , J. and Miller , R. "Surface Cleaning by a Cryogenic Argon Aerosol." . Proceedings Institute of Environmental Sciences . pp. 8882 – 8885 .
  • Loveridge , R. "CO2 Jet Spray Cleaning of IR Thin Film Coated Optics." . Proceedings of Society for Optical Engineering . July . pp. 25 – 26 .
  • John , W. , Fritter , D. and Winklmayr , W. 1991 . "Resuspension Induced by Impacting Particles." . J. Aerosol Sci. , 22 : 723 – 736 .
  • John , W. and Sethi , V. 1993 . "Breakup of Latex Doublets by Impaction." . Aerosol Science and Technology , 19 : 57 – 68 .
  • Kohli , R. 1997 . "Nonaqueous Processes Provide Critical Cleaning Alternatives." . Precision Cleaning , 5 : 19 – 23 .
  • Wang , C. , Chang , R. , Lin , W. , Lin , R. , Liang , M. , Yang , J. and Wang , J. 1999 . "Supercritical CO2 Fluid for Chip Resistor Cleaning." . J. of the Electrochemcial Society , 146 : 3485 – 3488 .
  • Narayanswami , N. 1999 . "A Theoretical Analysis of Wafer Cleaning using a Cryogenic Aerosol." . J. of the Electrochemical Society , 146 : 767 – 774 .
  • O'Neill , M. 1968 . "A Sphere in Contact with a Plane Wall in a Slow Linear Shear Flow." . Chem. Eng. Sci. , 23 : 1293 – 1298 .
  • Saffman , P. G. 1965 . "The Lift on a Small Sphere in a Slow Shear Flow." . J. Fluid Mechanics , 22 : 385 – 395 .
  • Fan , S. L. and Zhu , C. 1998 . Principles of Gas-Solid Flows , Cambridge : Cambridge University Press .
  • Tsai , C. J. , Pui , D. Y. H. and Liu , B. Y H. 1991 . "Particle Detachment from Disk Surfaces of Computer Disk Drives." . J. Aerosol Sci. Technology , 22 : 737 – 746 .
  • Wang , C. 1990 . "Effects of Inceptive Motion on Particle Detachment." . Aerosol Sci. Technol , 13 : 386 – 396 .
  • Cleaver , J. W. and Yates , B. 1975 . "A Sub Layer Model for the Deposition of Particles from a Turbulent Flow." . Chem. Eng. Sci. , 30 : 983 – 992 .
  • Fichman , M. , Gutfinger , C. and Pnueli , D. 1988 . "A Model for Turbulent Deposition of Aerosols." . J. Aerosol Sci. , 19 : 123 – 136 .
  • Fan , F. and Ahmadi , G. 1993 . "A Sublayer Model for Turbulent Deposition of Particles in Vertical Ducts with Smooth and Rough Surfaces." . J. Aerosol Sci. , 24 : 45 – 64 .
  • Toscano , C. and Ahmadi , G. 2003 . "Experimental Study of Particle Removal in Cryogenic Surface Cleaning." . J. Adhesion , (to be submitted)

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