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The Journal of Photographic Science Volume 29, 1981 - Issue 6
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Original Articles

Quantitative Examination of Photofabricated Profiles Part 6: High Depth to Width Ratio Profiles in (110) Silicon Produced by Anisotropic Photoetching

D. M. AllenSchool of Production Studies, Cranfield Institute of Technology, Cranfield, Bedford, MK43 OAL
,
D. F. HorneSchool of Production Studies, Cranfield Institute of Technology, Cranfield, Bedford, MK43 OAL
,
I. A. RoutledgeSchool of Production Studies, Cranfield Institute of Technology, Cranfield, Bedford, MK43 OAL
&
G. W. W. StevensSchool of Production Studies, Cranfield Institute of Technology, Cranfield, Bedford, MK43 OAL
Pages 244-248 | Received 03 Aug 1981, Published online: 21 Jul 2016

References

  • Allen, D. M., Horne, D. F. and Stevens, G. W. W., J. photogr. Sci., 26, 242 (1978).
  • Stoller, A. 1., KCA Review, 31, 271 (1970).
  • Bean, K. E., IEEE Trans. Electron Devices, ED-25, 1185 (1978).
  • Allen, D. M., Horne, D. F., Routledge, I. A. and Stevens, G. W. W., Precision Engineering, 2, 177 (1980).
  • Amniar, E. S. and Rodgers, T. J., IEEE Trans. Electron Devices, ED–27, 907 (1980).
  • Kendall, D. L" Applied Physics Letters, 26, 195 (1975).
  • Pugacz-Muraszkiewicz, I. J., IMM J. Res. Develop., 16, 523 (1972).
  • Allen, D. M., Horne, D. F. and Stevens, G. W. W., J. photogr. Sci., 26, 72 (1978).
  • Allen, D. M., Horne, D. F. and Stevens, G. W. W., J. photogr. Sci., 27, 181 (1979).
  • Allen, D. M., Precision Engineering, 3, 161 (1981).

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