References
- Beale, J. R. A., Emms, E. T. and Hilbourne, R. A., Microlectronics, Taylor and Francis Ltd., London (PHI).
- Hepher. M. “The photo-resist story”, J. phatogr. Sci, 12, 181 (1964).
- Stevens. G. W. W., “Photographic techniques for microelectronics”, J. phatogr. Sci., 25, 70(1977).
- Stevens, G. W. W., Microphotography: Photography and Photofabrication at Extreme Resolution, 2nd ed., Chapman and Hall, London, and John Wiley, New York. (1968).