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Original Articles

Inspection of Integrated Circuit Photomasks using Optical Data Processing TechniquesFootnote

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Pages 1-10 | Received 14 May 1985, Published online: 25 Jul 2016

References

  • Yu, F. T. S., Zhuang, S. L. and Wang, N. H., Proc. S.P.I.E., 360, 310 (1982).
  • Watkins, L. S., Proc. I.E.E.E., 57, No. 9, 1634-1639. Watkins, L. S., Appl. Opt., 12, No. 8, 1880(1973).
  • Will, P. M. and Pennington, K. S., Appl. Opt., 10, No. 9,2097(1971).
  • Goodman, J. W., Introduction to Fourier Optics, McGraw-Hill, ______, (1968).
  • Gaskill, .1. D., Linear Systems, Fourier Transforms and Optics, Wiley, ________, (1978).
  • Vander Lugt, A., I.E.E.E. Trans. Inf. Theory, IT-10, 139 (1964).
  • Vander Lugt, A., Appl. Opt., 6, No. 7, 1221 (1967).
  • Bromley, K., Monahan, M. A., Bryant, J. F. and Thompson, B. J., Appl. Phys. Lett., 14, No. 2, 67-70(1969),
  • Laycock, L. C. and Pelts, C. R., GEC J. Res., 1, No. 2 (1983).

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