Publication Cover
Journal of Quality Technology
A Quarterly Journal of Methods, Applications and Related Topics
Volume 33, 2001 - Issue 2
20
Views
40
CrossRef citations to date
0
Altmetric
Articles

Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances

Pages 153-166 | Published online: 20 Feb 2018

References

  • Aström, K. J. and Wittenmark, B. (1997). Computer Controlled Systems, Theory and Design, 3rd ed. Prentice Hall, Englewood Cliffs, NJ.
  • Box G. E. P.; Jenkins, G. M.; and Reinsel, G. (1994). Time Series Analysis, Forecasting, and Control, 3rd. ed., Prentice Hall, NJ.
  • Box, G. E. P. and Luceño, A. (1995). “Discrete Proportional-Integral Control With Constrained Adjustment”. The Statistician 44, pp. 479–495.
  • Box, G. E. P. and Luceño, A. (1997a). Statistical Control by Monitoring and Feedback Adjustment. John Wiley & Sons, New York, NY.
  • Box, G. E. P. and Luceño, A. (1997b). “Discrete Proportional-Integral Adjustment and Statistical Process Control”. Journal of Quality Technology 29, pp. 248–260.
  • Butler, S. W. and Stefani, J. A. (1994). “Supervisory Run-to-Run Control of a Polysilicon Gate Etch Using In Situ Ellipsometry”. IEEE Transactions on Semiconductor Manufacturing 7, pp. 193–201.
  • Del Castillo, E. (1999). “Long-run and Transient Analysis of a Double EWMA Feedback Controller”. IIE Transactions 31, pp. 1157–1169.
  • Del Castillo, E. (2000). “Closed-loop Disturbance Identification and Controller Tuning for Discrete Manufacturing Processes”. to appear in Technometrics.
  • Del Castillo, E. and Hurwitz, A. (1997). “Run to Run Process Control: A Review and Some Extensions”. Journal of Quality Technology 29, pp. 184–196.
  • Garcia, C. E. and Morari, M. (1985). “Internal Model Control. 2. Design Procedure for Multivariable Systems”. Industrial Engineering Chemistry Process Design and Devvelopment 24, pp. 472–484.
  • Hamby, E. S.; Kabamba, P. T.; and Khargonekar, P. P. (1998). “A Probabilistic Approach to Run-to-Run Control”. IEEE Transactions on Semiconductor Manufacturing (to appear).
  • Hamilton, J. D. (1994). Time Series Analysis. Princeton University Press, Princeton, NJ.
  • Ingolfsson A. and Sachs, E. (1993). “Stability and Sensitivity of an EWMA Controller”. Journal of Quality Technology 25, pp. 271–287.
  • Jensen, K. L. and Vardeman, S. B. (1993). “Optimal Adjustment in the Presence of Deterministic Process Drift and Random Adjustment Error”. Technometrics 35, pp. 376–389.
  • Luceño, A. and González, F. J. (1999). “Effects of Dynamics on the Properties of Feedback Adjustment Schemes with Dead Band”. Technometrics 41, pp. 142–152.
  • MacGregor, J. F. (1988). “On-Line Statistical Process Control”. Chemical Engineering Progress, October, pp. 21–31.
  • Patel, N. S. and Jenkins, S. T. (1998). “Adaptive Optimization of Run-to-Run Controllers: The EWMA Example”. Unpublished technical document, Texas Instruments Inc., Dallas TX.
  • Rivera, D. E.; Morari, M.; and Skogestad, S. (1985). “Internal Model Control. 4. PID Controller Design”. Industrial Engineering Chemistry Process Design and Devvelopment 25, pp. 252–265.
  • Sachs, E.; Hu, A.; and Ingolfsson, A. (1995). “Run by Run Process Control: Combining SPC and Feedback Control”. IEEE Transactions on Semiconductor Manufacturing 8, pp. 26–43.
  • Smith, T. H. and Boning, D. S. (1997). “Artificial Neural Network Exponentially Weighted Moving Average Controller for Semiconductor Processes”. Journal of Vacuum Science & Technology a, 15, p. 3.
  • Tsung, F.; Wu, H.; and Nair, V. (1998), “On the Efficiency and Robustness of Discrete Proportional-Integral Control Schemes”. Technometrics 40, pp. 214–222.
  • Yusof, R. and Omatu, S. (1993). “A Multivariate Self-Tuning PID Controller”. International Journal of Control 57, pp. 1387–1403.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.