Advanced search
Publication Cover
Journal of Quality Technology
A Quarterly Journal of Methods, Applications and Related Topics
Volume 41, 2009 - Issue 2
Submit an article Journal homepage
92
Views
26
CrossRef citations to date
0
Altmetric
Articles

A Review of Statistical Methods for Quality Improvement and Control in Nanotechnology

Jye-Chyi LuGeorgia Institute of Technology, Atlanta, GA30332-0205, USAView further author information
,
Shuen-Lin JengNational Cheng Kung University, Tainan701, TaiwanView further author information
&
Kaibo WangTsinghua University, Beijing100084, P. R. ChinaView further author information
Pages 148-164 | Published online: 21 Nov 2017

References

General References

Design of Experiments

  • Barglik-Chory, C.; Strohm, C. R. H.; and Muller, G. (2004). “Adjustment of the Band Gap Eenergies of Biostabilized CdS Nanoparticles by Aapplication of Statistical Design of Experiments”. Journal of Physical Chemistry, Series B 108 (23), pp. 7637–7640.
  • Basumallick, A.; Das, G. C.; and Mukherjee, S. (2003). “Design of Experiments for Synthesizing In Situ Ni-SiO2 and CO-SiO2 Nanocomposites by Non-isothermal Reduction Treatment”. Nanotechnology 14 (8), pp. 903–906.
  • Cota-Sanchez, G.; Soucy, G.; Huczko, A.; and Lange, H. (2005). “Induction Plasma Synthesis of Fullerenes and Nanotubes Using Carbon Black-Nickel Particles”. Carbon 43 (15), pp. 3153–3166.
  • Dasgupta, T. (2007). “Robust Parameter Design for Automatically Controlled Ssystems and Nanostructure Synthesis”. Ph.D. Dissertation, Georgia Institute of Technology, Atlanta, GA.
  • Dasgupta, T.; Ma, C.; Joseph, V. R.; Wang, Z. L.; and Wu, C. F. J. (2008). “Statistical Modeling and Analysis for Robust Synthesis of Nanostructures”. Journal of the American Statistical Association 103, pp. 594–603.
  • Fasulo, P. D.; Rodgers, W. R.; Ottaviani, R. A.; and Hunter, D. L. (2004). “Extrusion Processing of TPO Nanocomposites”. Polymer Engineering and Science 44 (6), pp. 1036–1045.
  • Hou, T.-H.; Su, C.-H.; and Liu, W.-L. (2007). “Parameters Optimization of a Nanoparticle Wet Milling Process Using the Taguchi Method, Response Surface Method and Genetic Algorithm”. Powder Technology 173 (3), pp. 153–162.
  • Kim, K. D.; Han, D. N.; and Kim, H. T. (2004). “Optimization of Experimental Conditions Based on the Taguchi Robust Design for the Formation of Nano-Sized Silver Particles by Chemical Reduction Method”. Chemical Engineering Journal 104 (1–3), pp. 55–61.
  • Kim, K. D.; Kim, S. H.; and Kim, H. T. (2005). “Applying the Taguchi Method to the Optimization for the Synthesis of TiO2 Nanoparticles by Hydrolysis of TEOT in Micelles”. Colloids and Surfaces: A—Physicochemical and Engineering Aspects 254 (1–3), pp. 99–105.
  • Lin, T. Y.; Davison, K. L.; Leong, W. S.; Chua, S.; Yao, Y. F.; Pan, J. S.; Chai, J. W.; Toh, K. C.; and Tjiu, W. C. (2003). “Surface Topographical Characterization of Silver-Plated Film on the Wedge Bondability of Leaded IC Packages”. Microelectronics Reliability 43, pp. 803–809.
  • Montgomery, D. C. (2005). Design and Analysis of Experiments. New York, NY: Wiley.
  • Nazzal, S.; Nutan, M.; Palamakula, A.; Shah, R.; Zaghloul, A. A.; and Khan, M. A. (2002). “Optimization of a Self-Nanoemulsified Tablet Dosage Form of Ubiquinone Using Response Surface Methodology: Effect of Formulation Ingredients”. International Journal of Pharmaceutics 240 (1–2), pp. 103–114.
  • Nembhard, H. B.; Acharya, N.; Aktan, M.; and Kim, S. (2006). “Design Issues and Analysis of Experiments in Nanomanufacturing”. In Handbook of Industrial and Systems Engineering, Badiru, A. B. ed., pp. 17.1–17.24. Boca Raton, FL: CRC Taylor & Francis.
  • Prakobvaitayakit, M. and Nimmannit, U. (2003). “Optimization of Polylactic-Co-Glycolic Acid Nanoparticles Containing Itraconazole Using 2∧3 Factorial Design”. AAPS PharmSciTech 4 (4), pp. 1–9.
  • Taguchi, G. (1986). Introduction to Quality Engineering: Designing Quality into Products and Processes. Tokyo: The Asian Productivity Organization.
  • Yong, V. and Hahn, H. T. (2005). “Dispersant Optimization Using Fesign of Rxperiments for SiC/Vinyl Ester Nanocomposites”. Nanotechnology 16 (4), pp. 354–360.
  • Yördem, O. S.; Papila, M.; and Menceloğlu, Y. Z. (2008). “Effects of Electrospinning Parameters on Polyacrylonitrile Nanofiber Diameter: An Investigation by Response Surface Methodology”. Materials and Design 29 (1), pp. 34–44.

Data Collection, Analysis, and Modeling

  • Bazant, Z. P. and Pang, S.-D. (2007). “Activation Energy Based Extreme Value Statistics and Size Effect in Brittle and Quasibrittle Fracture”. Journal of the Mechanics and Physics of Solids 55, pp. 91–131.
  • Belich, T. J.; Shen, Z.; Campbell, S. A.; and Kakalios, J. (2003). “Non-Gaussian 1/f Noise as a Probe of Long-Range Sstructural and Electronic Disorder in Amorphous Silicon”. In Proceedings of SPIE, vol. 5112, pp. 67–77.
  • Chang, I. J.; Kang, K.; Mukhopadhyay, S.; Kim, C. H.; and Roy, K. (2005). “Fast and Accurate Estimation of Nanoscaled SRAM Read Failure Probability Using Critical Point Sampling”. In Proceedings of the 2005 IEEE Custom Integrated Circuits Conference, pp. 439–442.
  • Chen, S. Y.; Huang, Y. H.; and Cai, B. N. (2005). “Normal Distribution of Confinement Energy from a Photoluminescence Line Shape Aanalysis in Oxidized Porous Silicon”. Solid-State Electronics 49 (6), pp. 940–944.
  • Chen, Y. P. and Lee, J. D. (2004). “Multiscale Modeling of Polycrystalline Silicon”. International Journal of Engineering Science 42 (10), pp. 987–1000.
  • Granier, J. J. and Pantoya, M. L. (2004). “The Effect of Size Distribution on Burn Rate in Nanocomposite Thermites: A Probability Density Function Study”. Combustion Theory and Modeling 8, pp. 555–565.
  • Hsieh, M.-S. and Jeng, S.-L. (2007). “Accelerated Discrete Degradation Models for Leakage Current of Ultra-Thin Gate Oxides”. IEEE Transactions on Reliability 56 (3), pp. 369–380.
  • Jefferson, G.; Garmestani, H.; Tannenbaum, R.; Gokhale, A.; and Tadd, E. (2005). “Two-Point Probability Distribution Function Aanalysis of Co-Polymer Nano-Composites”. International Journal of Plasticity 21, pp. 185–198.
  • Li, X.; Le, J.; Pileggi, L. T.; and Strojwas, A. (2005). “Projection-Based Performance Modeling for Inter/Intra-Die Variations”. In Proceedings of the 2005 IEEE/ACM International Conference on Computer-Aided Design, pp. 721–727.
  • Margolin, G. and Barkai, E. (2005). “Nonergodicity of Blinking Nanocrystals and Other Levy-Walk Processes”. Physical Review Letters 94 (8), 080601(1–4).
  • Miranda, E. and Jimenez, D. (2004). “A New Model for the Breakdown Dynamics of Ultra-Thin Gate Oxides Based on the Stochastic Logistic Differential Equation”. In Proceedings of the 24th International Conference on Microelectronics, pp. 625–628.
  • Onodera, H. (2006). “Variability: Modeling and Its Impact on Design”. IEICE Transactions on Electronics E89-C (3), pp. 342–348.
  • Qi, Y.; Gao, J.; and Fortes, J. (2005). “Markov Chains and Probabilistic Computation—A General Framework for Multiplexed Nanoelectronic Systems”. IEEE Transactions on Nanotechnology 4 (2), pp. 194–205.
  • Rejimon, T. and Bahnja, S. (2005). “Time and Space Efficient Method for Accurate Computation of Error Detection Probabilities in VLSI Circuits”. Proceedings of the 2005 IEE Computers and Digital Techniques 152 (5), pp. 679–685.
  • Schneider, D.; Siemroth, P.; Schulke, T.; Berthold, J.; Schultrich, B.; Schneider, H. H.; Ohr, R.; and Petereit, B. (2002). “Quality Control of Ultra-Thin and Super-Hard Coatings by Laser-Acoustics”. Surface and Coatings Technology 153 (2–3), pp. 252–260.
  • Zhao, Y.; Dey, S.; and Chen, L. (2004). “Double Sampling Data Checking Technique: An Online Testing Solution for Multisource Noise-Induced Errors on On-Chip Interconnects and Buses”. IEEE Transactions on Very Large Scale Integration (VLSI) Systems 12 (7), pp. 746–755.

Statistical Process Control and Quality Control

  • Christofides, P. D. and Armaou, A. (2006). “Control and Optimization of Multiscale Process Systems”. Computers & Chemical Engineering 30 (10–12), pp. 1670–1686.
  • Das, T. K.; Ganesan, R.; Sikder, A. K.; and Kumar, A. (2005). “Online End Point Detection in CMP Using SPRT of Wavelet Decomposed Sensor Data”. IEEE Transactions on Semiconductor Manufacturing 18 (3), pp. 440–447.
  • Fenner, J. S.; Jeong, M. K.; and Lu, J.-C. (2005), “Optimal Automatic Control of Multistage Production Processes”. IEEE Transactions on Semiconductor Manufacturing 18 (1), pp. 94–103.
  • Gallivan, M. A. (2005). “An Estimation Study for Control of a Lattice Model of Thin Film Deposition”. Computers & Chemical Engineering 29 (4), pp. 761–769.
  • Ganesan, R.; Das, T. K.; Sikder, A. K.; and Kumar, A. (2003). “Wavelet-Based Identification of Delamination Defect in CMP (Cu-Low k) Using Nonstationary Acoustic Emission Signal”. IEEE Transactions on Semiconductor Manufacturing 16 (4), pp. 677–685.
  • Jiang, X. and Blunt, L. (2004). “Third Generation Wavelet for the Extraction of Morphological Features from Micro and Nano Scalar Surfaces”. Wear 257, pp. 1235–1240.
  • Klepper, C. C.; Carlson, E. P.; Hazelton, R. C.; Yadlowsky, E. J.; Feng, B.; Taher, M. A.; and Meyer, H. M. (2005). “H-Alpha Emission as a Feedback Control Sensor for Reactive Sputter Deposition of Nano-Structured, Diamond-Like Carbon Coatings”. IEEE Transactions on Plasma Science 33 (2), pp. 799–807.
  • Lantz, M. A.; Binnig, G. K.; Despont, M.; and Drechsler, U. (2005). “A Micromechanical Thermal Displacement Sensor with Nanometre Resolution”. Nanotechnology 16 (8), pp. 1089–1094.
  • Lin, T.; Pan, Y.; and Hsieh, C. (2003). “Precision-Limit Positioning of Direct Drive Systems with the Existence of Ffriction”. Control Engineering Practice 11, pp. 233–244.
  • Lou, Y. and Christofides, P. D. (2003), “Estimation and Control of Surface Roughness in Thin Film Growth Using Kinetic Monte-Carlo Models”. Chemical Engineering Science 58, pp. 3115–3129.
  • Lou, Y. M. and Christofides, P. D. (2006). “Nonlinear Feedback Control of Surface Roughness Using a Stochastic PDE: Design and Application to a Sputtering Process”. Industrial & Engineering Chemistry Research 45 (21), pp. 7177–7189.
  • Mae, K. and Honda, T. (2000). “Growth Mode Variations of Thin Films on Nano-Faceted Substrates”. Thin Solid Films 373 (1–2), pp. 199–202.
  • Ng, H. T.; Li, J.; Smith, M. K.; Nguyen, P.; Cassell, A.; Han, J.; and Meyyappan, M. (2003). “Growth of Epitaxial Nanowires at the Junctions of Nanowalls”. Science 300 (5623), pp. 1249–1249.
  • Ni, D. and Christofides, P. D. (2005a). “Dynamics and Control of Thin Ffilm Surface Microstructure in a Complex Deposition Process”. Chemical Engineering Science 60 (6), pp. 1603–1617.
  • Ni, D. and Christofides, P. D. (2005b). “Multivariable Predictive Control of Thin Film Deposition Using a Stochastic PDE model”. Industrial & Engineering Chemistry Research 44 (8), pp. 2416–2427.
  • Ohshima, M. (2003). “Control and Design Problems in Material Processing–How Can Process Systems Engineers Contribute to Material Processing?” Journal of Process Control 13, pp. 599–605.
  • Salapaka, S.; Sebastian, A.; Cleveland, J. P.; and Salapaka, M. V. (2002). “High Bandwidth Nano-Positioner: A Robust Control Approach”. Review of Scientific Instruments 73 (9), pp. 3232–3241.
  • Sneh, O.; Clark-Phelps, R. B.; Londergan, A. R.; Winkler, J.; and Seidel, T. E. (2002). “Thin Film Atomic Layer Deposition Equipment for Semiconductor Processing”. Thin Solid Films 402 (1–2), pp. 248–261.
  • Van Kampen, N. G. (1992). Stochastic Processes in Physics and Chemistry. Amsterdam, The Netherlands: North-Holland.

Future Research

  • Edgar, T. F.; Butler, S. W.; Campbell, W. J.; Pfeiffer, C.; Bode, C.; Hwang, S. B., Balakrishnan, K. S.; and Hahn, J. (2000). “Automatic Control in Microelectronics Manufacturing: Practices, Challenges, and Possibilities”. Automatica 36 (11), pp. 1567–1603.
  • Del Castillo, E. (2006). “Statistical Process Adjustment: A Brief Retrospective, Current Status, and Some Opportunities for Further Work”. Statistica Neerlandica 60 (3), pp. 309–326.
  • Jeong, M. K.; Lu, J.-C.; and Wang, N. (2006). “Wavelet-Based SPC Procedure for Complicated Functional Data”. International Journal of Production Research 44 (4), pp. 729–744.
  • Qian, Z. and Wu, C. F. J. (2007). “Bayesian Hierarchical Modeling for Integrating Low-Accuracy and High-Accuracy Experiments”. Technometrics in press.
  • Joseph, V. R. (2003). “Robust Parameter Design with Feed-Forward Control”. Technometrics 45, pp. 284–292.
  • Sung, H. J.; Su, J.; Berglund, J. D.; Russ, B. V.; Meredith, J. C.; and Galis, Z. S. (2005). “The Use of Temperature-Composition Combinatorial Libraries to Study the Effects of Biodegradable Polymer Blend Surfaces on Vascular Cells”. Biomaterials 26, pp. 4557–4567.
  • Wang, K. and Tsung, F. (2007). “Run-to-Run Process Adjustment Using Categorical Observations”. Journal of Quality Technology 39 (4), pp. 312–325.
  • Wang, N.; Lu, J.-C.; and Kvam, P. (2007). “Multi-Level Spatial Modeling and Decision-Making with Application in Logistics Systems”. Technical report, The School of Industrial and Systems Engineering, Georgia Institute of Technology, Atlanta, GA.
  • Xia, H. F.; Ding, Y.; and Mallick, B. K. (2007). “Bayesian Hierarchical Model for Integrating Multi-Resolution Metrology Data”. Paper presented in the best student paper competition, INFORMS Conference–Quality, Statistics and Reliability Section, Seattle, WA.
  • Yuan, M.; Joseph, V. R.; and Lin, Y. (2007). “An Efficient Variable Selection Approach for Analyzing Designed Experiments”. Technometrics in press.
  • Yuan, T. and Kuo, W. (2006). “Defect Pattern Recognition in Semiconductor Fabrication Using Model-Based Clustering and Bayesian Inference”. Paper presented in the best student paper competition, INFORMS Conference–Quality, Statistics and Reliability Section, Pittsburgh, PA.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.