Electrical and electron microscopy observations on defects in ion implanted silicon

References

• Mazey , D. J. , Nelson , R. S. and Barnes , R. S. 1968 . Phil. Mag. , 17 : 1145
   Google Scholar
• Mayer , J. W. , Eriksson , L. , Picraux , S. T. and Davies , J. A. 1968 . Can. J. Phys. , 46 : 663
   Web of Science ®Google Scholar
• Kurtin , S. L. , Shifrin , G. A. and McGill , T. C. 1969 . Appl. Phys. Letters , 14 : 223
   Web of Science ®Google Scholar
• Large , L. N. and Bicknell , R. W. 1967 . J. Mat. Sci. , 2 : 589
   Google Scholar
• Booker , G. R. and Stickler , R. 1962 . J. Appl. Phys. , 13 : 446
   Web of Science ®Google Scholar
• Rumsh , M. A. , Konorov , P. P. and Lyubits . 1965 . Bulletin of the Leningrad University No. 10 52
   Google Scholar
• Schwuttke , G. H. 1970 . 41 Air Force Cambridge Research Laboratories Report No. AFCRL–70–0459
   Google Scholar
• Chopra . Proc. Sixth Int. Congress for Electron Microscopy . Kyoto. pp. 519
   Google Scholar
• Matthews , M. D. and James , P. F. 1969 . Phil Mag. , 19 : 1179
   Google Scholar
• Davidson , S. M. Proc. European Conf. on Ion Implantation . Reading. pp. 238
   Google Scholar
• Davidson , S. M. Proc. Seventh Int. Congress for Electron Microscopy . Grenoble. pp. 231
   Google Scholar
• Matthews , M. D. 1969 . J. Mat. Sci. , 4 : 997
   Google Scholar
• Gusev , V. M. , Martynenko , Y. V. and Starinin , C. V. Proc. Int. Conf. on Atomic Collision Phenomena in Solid . Brighton, U.K.. pp. 162
   Google Scholar
• Nelson , R. S. , Blamires , N. G. and Cairns , J. A. 1970 . Proc. Int. Conf. on Ion Implantation in Semiconductors . May 1970 , California.
   Google Scholar
• 1970 . Radiation Effects , 6 : 131
   Google Scholar
• Eberle , D. E. ‘Ion Implantation Damage Effects Silicon’ . presented at IEEE Conf. on Nuclear and Space Radiation Effects . San Diego.
   Google Scholar
• Blamires , N. G. , Matthews , M. D. and Nelson , R. S. 1968 . Phys. Letters , 28a : 178
   Google Scholar
• Moorhead , F. F. Jnr. and Crowder , B. L. 1970 . Rad. Effects , 6 : 27
   Google Scholar
• Crowder , B. L. 1970 . J. Electrochem. Soc. , 117 : 671
   Web of Science ®Google Scholar
• Hirsch , P. B. , Howie , A. , Nicholson , R. B. , Pashley , D. W. and Whelan , M. J. ‘Electron Microscopy of Thin Crystals’ , 131 Butterworths .
   Google Scholar