The mechanisms of impurity redistribution on laser-annealing of ion-implanted semiconductors

References

• Kachurin , G. A. and Nidaev , E. V. 1977 . Fiz. Tekh. Poluprov. , 11 : 603 [Sov. Phys.–Semicond. 11, 350 (1977)].
   Google Scholar
• Shtyrkov , E. I. , Khaibullin , I. B. , Zaripov , M. M. , Galyatudinov , M. F. and Bayasitov , R. M. 1975 . Fiz. Tekh. Poluprov. , 9 : 2000 [Sov. Phys.–Semicond. 9, 1309 (1975)].
   Google Scholar
• Kutukova , O. G. and Streltsov , Z. N. 1976 . Fiz. Tekh. Poluprov. , 10 : 443 [Sov. Phys.–Semlcond. 10, 265 (1976)].
   Google Scholar
• Kh. Antonenko , A. , Gerasimenko , N. N. , Dvurechnesky , A. V. , Smirnov , L. S. and Tseitlin , G. M. 1976 . Fiz. Tekh. Poluprov. , 10 : 139 [Sov. Phys.–Semicond. 10, 81 (1976)].
   Google Scholar
• Geiler , H.-D. , Götz , G. and Klinge , K.-D. 1977 . Nguen ba Triem., Proc. of VIII Conference on the Interaction of Charged Particles with Crystals, Moscow, 1976 . Phys. Stat. Sol., (a) , 41 : K171
   Web of Science ®Google Scholar
• Shashkov , Yu. M. and Gurevich , V. M. 1968 . Zh. Fiz. Khimii , 42 : 2058 [Russian J. Phys. Chem. 42, 1082 (1968)].
   Google Scholar
• Tsuchimoto , T. and Tokuyama , T. 1970 . Rad. Eff , 6 : 121
   Google Scholar