Crystallographic nature and formation mechanisms of highly irregular structure in implanted and annealed Si layers

References

• Davidson , S. M. 1970 . Proc. European Conf. on Ion Implantation , 19
   Google Scholar
• Mazey , D. J. , Nelson , R. S. and Barnes , R. S. 1968 . Phil. Mag. , 17 : 1145
   Google Scholar
• Large , L. N. and Bicknell , R. W. 1967 . Journ. Mater. Sci. , 2 : 589
   Web of Science ®Google Scholar
• Karmanov , V. T. , Pavlov , P. V. , Zorin , E. I. , Tetelbaum , D. I. and Knokhlov , A. F. 1975 . Fiz. Tekh. Poluprov. , 9 : 1786
   Google Scholar
• Karmanov , V. T. , Khokhlov , A. F. , Pavlov , P. V. and Zorin , E. I. 1977 . Fiz. Tekh. Poluprov. , 11 : 1871
   Google Scholar
• Katsumi , Murase and Hivoyuki , Harada . 1977 . J. Appl. Phys. , 48 : 4404
   Google Scholar
• Ohdomari , Iwao and Nobuyki , Onoda . 1977 . Phil. Mag. , 35 : 1373
   Google Scholar
• Baither , D. and Krylov , J. International Conference on Ion Implantation in Semiconductors . Budapest. pp. 155
   Google Scholar
• Csepregi , L. , Mayer , J. W. and Sigmon , T. W. 1976 . Appl. Phys. Lett. , 29 : 92
   Web of Science ®Google Scholar
• Schwuttke , G. H. , Brack , K. , Gorey , E. F. , Kahan , A. , Lowe , L. F. and Euler , F. 1972 . Phys. Stat. Sol. (a) , 14 : 107
   Web of Science ®Google Scholar
• Matthews , M. D. and James , P. F. 1969 . Phil. Mag. , 19 : 1179
   Google Scholar
• Mazey , D. J. , Nelson , R. S. and Barnes , R. S. Proc. 4th Eur. Reg. Conf. on Electron Microscopy . pp. 367 Rome
   Google Scholar
• Götz , G. K. , Klinge , D. , Shwabe , F. and Solov'yev , V. 1977 . Exper. Techn. Phys. , 25 : 71
   Google Scholar
• Hirsh , P. B. , Howie , A. , Nicholson , R. B. , Pashley , D. W. and Whelan , M. J. 1965 . Transmission Electron Microscopy of Thin Crystals , London : Butterworths .
   Google Scholar
• Kosevich , V. M. and Palatnik , L. S. 1976 . Elektronnomikroskopicheskie izobrazheniya dislokatsii i defektov upakovki , Moscow : “Nayka,” .
   Google Scholar
• Kumakhov , M. A. , Muralev , V. A. , Aver'yanov , E. G. , Smirnov , V. A. and Khavkin , A. P. Proyektivnye probegi i razbrosy probegov dlya 1240 kombinatsii ion-mishen' v intervale energii 20keV E 1000 keV, Moscow, Vsesoyuzn. Vsesoyuzn, instit. nauchn. i tekhnich. inform. dep. No. 700-75
   Google Scholar
• Götz , G. , Glaser , E. and Shwabe , F. 1975 . Trudy VI Vsesoyuznogo soveshchaniya PO fizike vzaimodeistviya zaryazhennykh chastitz s monokristallami 513 Moscow
   Google Scholar
• Ino , S. 1966 . J. Phys. Soc. Japan. , 21 : 346
   Google Scholar
• Pashley , D. W. and Stowell , M. I. 1963 . Phil. Mag. , 8 : 1605
   Google Scholar
• Kohn , J. A. 1958 . Amer. Mineralogist , 43 : 263
   Web of Science ®Google Scholar
• Gerasimenko , N. N. , Dvureshenskii , A. V. and Smirnov , L. S. 1975 . Fiz. Tekh. Poluprov. , 5 : 1700
   Google Scholar
• Pavlov , P. V. , Kruse , T. A. , Tetelbaum , D. J. , Zorin , E. I. , Shitova , E. V. and Gudkova , N. V. 1976 . Phys. Star. Sol. (a) , 36 : 81
   Web of Science ®Google Scholar
• Kostin , E. G. 1976 . Fiz. elektron. Respublik. mezhved. nauchn. tekhn. sborn. vyp. , 13 : 101
   Google Scholar
• Matthews , M. D. 1971 . Rad. Eff. , 11 : 167
   Google Scholar
• Romanov , S. I. and Smirnov , A. S. 1977 . Fiz. Tekh. Poluprov. , 6 : 1931
   Google Scholar
• Bourgoin , J. C. , Corbett , J. W. and Prish , H. L. 1973 . J. Chem. Phys. , 59 : 4042
   Web of Science ®Google Scholar
• Csepregi , L. , Mayer , J. W. , Kennedy , E. F. and Sigmon , T. W. 1977 . J. Appl. Phys. , 48 : 4234
   Web of Science ®Google Scholar