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Radiation Effects Volume 48, 1980 - Issue 1-4
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Original Articles

Optical effects resulting from deep implants of silicon with nitrogen and phosphorus

G. K. Hubler U.S. Naval Research Laboratory, Washington, DC, 20375, U.S.A.
,
P. R. Malmberg U.S. Naval Research Laboratory, Washington, DC, 20375, U.S.A.
,
C. A. Carosella U.S. Naval Research Laboratory, Washington, DC, 20375, U.S.A.
,
T. P. Smith III U.S. Naval Research Laboratory, Washington, DC, 20375, U.S.A.
,
W. G. Spitzer University of Southern California, Los Angeles, CA, 90007, U.S.A.
,
C. N. Waddell University of Southern California, Los Angeles, CA, 90007, U.S.A.
&
C. N. Phillippi U.S. Air Force Materials Laboratory, Dayton, OH, 45433, U.S.A.
 show all
Pages 81-85 | Published online: 20 Nov 2006

References

  • Schwuttke , G. H. July 1970 . Bedford, Massachusetts : Air Force Cambridge Research Laboratories Report AFRCL-70–0459 .
  • Borders , J. A. and Beezhold , W. 1971 . Ion Implantation in Semiconductors , Edited by: Ruge , I. and Graul , J. p. 241 New York : Springer-Verlag .
  • Kruze , R. A. , Tetelbaum , D. I. , Zorin , E. I. , Shitova , E. V. and Pavolv , P. V. 1975 . Iz. Ak. Navk SSSR , Vol. 11 , 1381 Neorgan. Mat. .
  • Genkina , N. A. , Pavlov , P. V. , Shitova , E. V. , Kruze , T. A. and Zorin , E. I. 1988, 1975 . Iz. Ak. Navk SSSR , 11 Neorgan. Mat. .
  • Edelman , F. L. , Kuznetov , D. N. , Lezheiko , L. V. and Lubopytova , E. V. 1976 . Rad. Eff. , 29 : 13
  • Crowder , B. L. and Title , R. S. 1971 . Ion Implantation , Edited by: Eisen , F. H. and Chadderton , L. T. p. 87 Gordon and Breach .
  • Kachare , A. H. , Spitzer , W. G. , Fredrickson , J. E. and Euler , F. K. 1976 . Jour. Appl. Phys. , 47 : 5374
  • Hubler , G. K. , Waddell , C. N. , Spitzer , W. G. , Wilson , R. G. , Prussin , S. and Fredrickson , J. K. 1979 . J. Appl. Phys. , 50 : 3294
  • Hubler , G. K. , Malmberg , P. R. and Smith , T. P. 1979 . J. Appl. Phys. , 50 : 7147
  • Heavens , O. S. 1955 . Optical Properties of Thin Solid Films , New York : Academic Press .
  • Gibbons , J. F. , Johnson , W. S. and Mylroie , S. W. 1975 . Projected Range Statistics In Semiconductors and Related Materials, 2nd Edition , Dowden : Hutchison Andross, Stroudsburs, Pennsylvania .
  • Seitz , F. 1940 . The Modern Theory of solids , New York : McGraw-Hill . Chap. 17
  • Spitzer , W. G. , Waddell , C. N. , Narayanan , G. H. , Fredrickson , J. E. and Prussin , S. 1977 . Appl. Phys. Lett. , 30 : 623

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