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Original Articles

Implant redistribution in high-dose ion implanted and annealed silicon

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Pages 87-90 | Published online: 20 Nov 2006

References

  • Williams , J. S. , Christodoulides , C. E. , Grant , W. A. , Andrew , R. , Brown , J. R. and Booth , M. 1977 . Radiation Effects , 32 : 55
  • Christodoulides , C. E. , Baragiola , R. A. , Chivers , D. , Grant , W. A. and Williams , J. S. 1978 . Radiation Effects , 36 : 73
  • Mayer , J. W. , Eriksson , L. and Davies , J. A. 1970 . Ion Implantation in Semiconductors , London : Academic Press .
  • Welch , J. D. , Davies , J. A. and Cobbold , R. S. C. 1977 . Journal of Applied Physics , 48 : 4540
  • Williams , J. S. 1978 . Nuclear Inst. and Methods , 149 : 207
  • Williams , J. S. , Alkaisi , M. M. and Christodoulides , C. E. to be published

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