Laser annealing of ion implanted GaAs

B. J. Sealy Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, UK

S. S. Kular Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, UK

K. G. Stephens Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, UK

D. Sadana Department of Metallurgy and Science of Materials, University of Oxford, UK

G. R. Booker Department of Metallurgy and Science of Materials, University of Oxford, UK

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Laser annealing of ion implanted GaAs

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