51
Views
2
CrossRef citations to date
0
Altmetric
Original Articles

Resistivity control of sputtered amorphous-silicon by ion-implantation

, , &
Pages 133-137 | Published online: 20 Nov 2006

References

  • Carlson , D. E. and Wronski , C. R. 1976 . Appl. Phys. Letters , 28 : 671
  • Muller , G. , Kalbitzer , S. , Spear , W. E. and Le Comber , P. G. 1977 . Proc. of 7th Int. Conf. on Amorphous and Liquid Semiconductors, at Edinburgh , : p. 442
  • Beyer , W. and Fisher , R. , eds. 1977 . “ If one may include interstitial doping by ion-implantation, there is another successful case ” . In Appl. Phys. Letters Vol. 31 , 850
  • Spear , W. E. and Le Comber , P. G. 1976 . Phil. Mag. , 33 : 935
  • Paul , W. , Lewis , A. L. , Connell , G. A. N. and Moustakas , T. D. 1976 . Solid State Commun. , 20 : 969
  • Le Comber , P. G. , Madan , A. and Spear , W. E. 1972 . J. Non-Cryst. Solids , 11 : 219
  • Matsumura , H. and Furukawa , S. unpublished
  • Mott , N. F. and Davis , E. A. 1971 . Electronic Process in Non-Crystalline Materials , Oxford : Clarendon Press . Chap. 7
  • Okamoto , H. and Hamakawa , Y. 1977 . Solid State Commun. , 24 : 23

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.