18
Views
7
CrossRef citations to date
0
Altmetric
Original Articles

Laser pulse annealing in semiconductors

Pages 161-166 | Published online: 20 Nov 2006

References

  • Young , R. T. , White , C. W. , Clark , J. , Narayan , J. , Christie , W. H. , Marakami , M. , King , P. W. and Kramer , S. D. 1978 . Appl. Phys. Lett. , 32 : 139
  • Celler , G. K. , Poate , J. M. and Kimerling , L. C. 1968 . Appl. Phys. Lett. , 32 : 464
  • Antonenko , A. K. , Gerasimenko , N. N. , Dvurechenskii , A. W. , Smirnov , L. S. and Tseitlin , G. M. 1976 . Sov. Phys. Semiconductors , 10 : 81
  • Shtyrkov , E. I. , Khibullin , I. B. , Zavipov , M. M. , Galyatudinov , M. F. and Bayazitov , R. M. 1975 . Sov. Phys. Semiconductors , 9 : 1309
  • Baeri , P. , Campisano , S. U. , Foti , G. and Rimini , E. 1978 . Appl. Phys. Lett. , 33 : 137
  • Foti , G. , Rimini , E. and Campisano , S. U. 1978 . Phys. Stat. Sol. (a) , 47 : 533
  • Hoonhout , D. , Herdijk , C. B. and Saris , F. W. 1978 . Phys. Lett. , 68A : 430
  • Khaibullin , I. B. , Shtykov , E. I. , Zaripov , M. M. , Bayzitov , R. M. and Galyatudinov , M. F. July 1977 . First USSR-USA Seminar on Ion Implantation Albany (N.Y.) , : p. 147
  • Foti , G. , Rimini , E. , Tseng , W. S. and Mayer , J. W. 1978 . Appl. Phys. , 15 : 365
  • Baeri , P. August 1978 . Computer Program LAER (PP/598) August ,

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.