Liquid and solid phase regrowth of Si by laser irradiation and thermally assisted flash annealing

J. M. Poate Bell Laboratories, Murray Hill, New Jersey, 07974, USA

J. C. Bean Bell Laboratories, Murray Hill, New Jersey, 07974, USA

W. L. Brown Bell Laboratories, Murray Hill, New Jersey, 07974, USA

R. L. Cohen Bell Laboratories, Murray Hill, New Jersey, 07974, USA

L. C. Feldman Bell Laboratories, Murray Hill, New Jersey, 07974, USA

H. J. Leamy Bell Laboratories, Murray Hill, New Jersey, 07974, USA

J. W. Rodgers Bell Laboratories, Murray Hill, New Jersey, 07974, USA

D. Rousseau Bell Laboratories, Murray Hill, New Jersey, 07974, USA

G. A. Rozgonyi Bell Laboratories, Murray Hill, New Jersey, 07974, USA

J. A. Shelnutt Bell Laboratories, Murray Hill, New Jersey, 07974, USA

T. T. Sheng Bell Laboratories, Murray Hill, New Jersey, 07974, USA

K. W. West Bell Laboratories, Murray Hill, New Jersey, 07974, USA

J. S. Williams Bell Laboratories, Murray Hill, New Jersey, 07974, USA; Royal Melbourne Institute of Technology, Melbourne, 3000, Australia

G. K. Celler Western Electric Engineering Research Center, Princeton, New Jersey, 08540, USA

References