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Original Articles

The effects of ion implantation on the thermal oxidation of GaAs

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Pages 203-206 | Published online: 20 Nov 2006

References

  • Butcher , D. N. and Sealy , B. J. 1978 . The thermal oxidation of GaAs . J. Phys. D: Appl. Phys. , 11 : 1451 – 1456 .
  • Butcher , D. N. and Sealy , B. J. 1977 . Electrical properties of thermal oxides on GaAs . Electron. Lett. , 13 : 558 – 559 .
  • Hasegawd , H. , Forward , K. E. and Hartnagel , H. L. 1975 . Improved method of anodic oxidation of GaAs . Electron. Lett. , 11 : 53 – 54 .
  • Bull , C. J. and Sealy , B. J. 1978 . Studies of thermally oxidised GaAs by transmission electron microscopy . Phil. Mag. , A37 : 489 – 500 .
  • Weinrich , O. A. 1966 . Oxide films grown on GaAs in an oxygen plasma . J. Appl. Phys. , 37 : 2924
  • Chang , R. P. H. and Sinha , A. K. 1976 . Plasma oxidation of GaAs . Appl. Phys. Letts. , 29 : 56 – 58 .
  • Takagi , H. , Kano , G. and Teramoto , I. 1978 . Thermal oxidation of GaAs in arsenic trioxide vapour . J. Electrochem. Soc. , 125 : 579 – 581 .
  • Johnson , J. F. , Gibbons , W. S. and Mylroie , S. W. 1975 . Projected range statistics, 2nd edition , Johnson Wiley and Sons Inc. .
  • Carter , G. , Colligon , J. S. and Grant , W. A. , eds. 1975 . I.o.P. Conf. Ser. No. 28. e.g. Applications of Ion Beams to Materials
  • Butcher , D. N. and Sealy , B. J. to be published

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