Advanced search
Publication Cover
Radiation Effects Volume 66, 1982 - Issue 1-2
Journal homepage
14
Views
0
CrossRef citations to date
0
Altmetric
Original Articles

Construction of highly asymmetric ion implantation profiles by pearson IV distribution

A. F. Burenkov Institute of Applied Physical Problems, V. I. Lenin Belorussian State University, Minsk, USSR
,
F. F. Komarov Institute of Applied Physical Problems, V. I. Lenin Belorussian State University, Minsk, USSR
&
M. M. Temkin Institute of Applied Physical Problems, V. I. Lenin Belorussian State University, Minsk, USSR
Pages 115-118 | Received 15 Dec 1981, Published online: 19 Aug 2006

References

  • Lindhard , J. , Scharff , M. and Shiatt , H. E. 1963 . Mat.-Fys. Medd. Dan. Vid. Selsk. , 33 ( 14 )
  • Gibbons , J. F. , Johnson , W. S. and Mylroie , S. 1975 . Projected Range Statistics , Stroudsburg, Pennyslvania : Dowden, Hachinson and Ross .
  • Winterbon , K. B. 1975 . Ion Implantation Range and Energy Deposition Distributions , vol. 1 , New York : Plenum .
  • Burenkov , A. F. , Komarov , F. F. , Kumakhov , M. A. and Temkin , M. M. 1980 . Tables of Ion-Implanted Spatial Distribution Parameters , Minsk : BSU Publishing House . in Russian
  • Hofker , W. K. 1975 . Phillips Research Reports Suppl. , : 41
  • Gibbons , J. F. and Mylroie , S. 1973 . Appl. Phys. Lett. , 22 : 268
  • Winterbon , K. B. , Sigmund , P. and Sanders , J. B. 1970 . Mat.-Fys. Medd. Dan. Vid. Selsk. , 37 ( 14 )
  • Yamamura , Y. and Inuma , H. 1978 . Rad. Effects , 38 : 251
  • Wilson , R. G. 1980 . Rad. Effects , 46 : 141
  • Burenkov , A. F. , Komarov , F. F. and Temkin , M. M. 1981 . Proc. X, Nat. Conf. Physics of the Charged Particles Interaction with Crystals , 469 Moscow : MSU Publishing House .
  • Kendall , M. G. and Stuart , A. 1958 . The Advanced Theory of Statistics , vol. 1 , London : Charles Griffin .
  • Burenkov , A , Komarov , F. F. and Temkin , M. M. Rad. Effects , to be published

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.