Ion bombardment effects in polymers

References

• Thompson , L. F. , Willson , C. G. and Bowden , M. J. S. , eds. 1983 . Introduction to Microlithography: Theory of Materials and Processing , Amer. Chem. Soc. .
   Google Scholar
• de Mayo , P. and Shizuka , H. 1973 . Mol. Photochem. , 5 : 339
   Google Scholar
• 1973 . J. Amer. Chem. Soc. , 95 : 3942
   Web of Science ®Google Scholar
• Yamashita , Y. , Ogura , K. , Kunishi , M. , Kawazu , R. , Ohne , S. and Mizokami , Y. 1979 . J. Vac. Sci. and Tech. , 16 : 2026
   Web of Science ®Google Scholar
• Kiraki , T. , Itatnao , Y. and Nonogaki , S. 1971 . J. Electrochem. Soc. , 118 : 669
   Web of Science ®Google Scholar
• Hall , T. M. , Wagner , A. and Thompson , L. F. 1979 . J. Vac. Sci. and Technol. , 16 : 1889
   Web of Science ®Google Scholar
• Puglisi , O. , Licciardell , A. , Pignataro , S. , Calcagno , L. and Foti , G. 1993 . 1993 . REI-3 Conference
   Google Scholar
• Brown , W. L. , Venkatesan , T. and Wagner , A. 1981 . Nuclear Instrum. and Meth. , 191 : 157
   Google Scholar
• Mladenov , G. M. and Emmoth , R. 1981 . Apply. Phys. Lett. , 38 : 12
   Google Scholar
• Greeneich , J. S. 1980 . Electron Beam Technology in Microelectronic Fabrication , Edited by: Brewer , G. R. 100 New York : Academic Press .
   Google Scholar
• Smith , T. C. Fourth International Conference on Ion Implantation Equipment . Berchtesgaden , , West Germany : Springer-Verlag .
   Google Scholar
• Venkatesan , T. , Edelson , D. and Brown , W. L. 1983 . Appl. Phys. Lett. , 43 : 4
   Web of Science ®Google Scholar
• Orvek , K. J. and Huffman , C. 1985 . Nucl. Inst. and Meth. , B7/8 : 501
   Google Scholar
• Venkatesan , T. , Forrest , S. R. , Kaplan , M. L. , Schmidt , P. H. , Murray , C. A. , Brown , W. L. , Wilkens , B. J. , Roberts , R. F. , Rupp , L. and Schonhorn , H. 1984 . J. Appl. Phys. , 56 : 10
   Web of Science ®Google Scholar
• Venkatesan , T. , Forrest , S. R. , Kaplan , M. L. , Murray , C. A. , Schmidt , P. H. and Wilkens , B. J. 1983 . J. Appl. Phys. , 54 : 3150
   Web of Science ®Google Scholar
• Kaplan , M. L. , Forrest , S. R. , Schmidt , P. H. and Venkatesan , T. 1984 . J. Appl. Phys. , 55 : 732
   Web of Science ®Google Scholar
• Venkatesan , T. , Levi , R. , Banwell , T. C. , Tombrello , T. , Nicolet , M. , Hamm , R. and Meixier , A. E. 1986 . Rad. Effects , 99
   Google Scholar
• Broers , A. N. , Molzen , W. W. , Cuomo , J. J. and Wittels , N. D. 1976 . Appl. Phys. Lett. , 29 : 596
   Web of Science ®Google Scholar
• Calcagno , L. , Sheng , K. L. , Torrisi , L. and Foti , G. 1984 . Appl. Phys. Lett. , 44 : 8
   Google Scholar
• Eskildsen , S. S. and Sorensen , G. 1985 . Appl. Phys. Lett. , 46 : 11
   Google Scholar
• 1984 . Ultraviolet Laser A blation of Organic Polymer Films , Vol. 39 , R. Srinivasan . Springer Series in Chemical Physics
   Google Scholar
• Kelly , R. and Dreyfus , R. W. 1986 . Rad. Effects , 99
   Google Scholar
• Dreyfus , R. W. , Walkup , R. E. and Kelly , R. 1986 . Rad. Effecfs , 99
   Google Scholar
• Srinivasan , R. 1985 . Photophysics and Photochemistry above 6 eV , Edited by: Lahmani , F. H. Amsterdam : Elsevier Science Publishers B.V. .
   Google Scholar
• Hess , W. Brigham Young University . from Ref. 21
   Google Scholar
• Garrison , B. J. and Srinivasan , R. 1985 . J. Appl. Phys. , 57 : 8
   Google Scholar
• Geis , M. W. , Randall , J. N. , Deutsch , T. F. , De Graff , P. D. , Krohn , K. E. and Stern , L. A. 1983 . Appl. Phys. Lett. , 43 : 1
   Web of Science ®Google Scholar
• Geis , M. W. , Randall , J. N. , Deutsch , T. F. , Efremow , N. N. , Donnelly , J. P. and Woodhouse , J. D. 1983 . J. Vac. Sci. Technol. , B1 : 4
   Google Scholar
• Geis , M. W. , Randall , J. N. , Mountain , R. W. , Woodhouse , J. D. , Bromley , E. I. , Astolfi , D. K. and Economou , N. P. 1985 . J. Vac. Sci. Technol. , B3 : 1
   Google Scholar
• Fleischer , R. L. , Price , P. B. and Walker , R. M. 1975 . Nuclear Tracks in Solids , Berkeley : University of California Press .
   Google Scholar