A Generalized Quasi-MMSE Controller for Run-to-Run Dynamic Models

References

• Box, G. E. P., Jenkins, G. M., and Reinsel, G. C. (1994), Time Series Analysis, Forecasting and Control (3rd ed.), Englewood Cliffs, NJ: Prentice Hall.
   Google Scholar
• Butler, S. W., and Stefani, J. A. (1994), “Supervisory Run-to-Run Control of Polysilicon Gate Etch using in Situ Ellipsometry,” IEEE Transactions on Semiconductor Manufacturing, 7, 193–201.
   Web of Science ®Google Scholar
• Capilla, C., Ferrer, A., Romero, R., and Hualda, A. (1999), “Integration of Statistical and Engineering Process Control in a Continuous Polymerization Process,” Technometrics, 41, 14–28.
   Web of Science ®Google Scholar
• Chen, A., and Guo, R. S. (2001), “Age-Based Double EWMA Controller and its Application to CMP Processes,” IEEE Transactions on Semiconductor Manufacturing, 14, 11–19.
   Web of Science ®Google Scholar
• Del Castillo, E. (2001), “Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances,” Journal of Quality Technology, 33, 153–166.
   Web of Science ®Google Scholar
• ——— (2002), Statistical Process Adjustment for Quality Control, New York: Wiley-Interscience.
   Google Scholar
• Fan, S. K. S., Jiang, B. C., Jen, C. H., and Wang, C. C. (2002), “SISO Run-to-Run Feedback Controller using Triple EWMA Smoothing for Semiconductor Manufacturing Processes,” International Journal of Production Research, 40, 3093–3120.
   Web of Science ®Google Scholar
• Hamby, E. S., Kabamba, P. T., and Khargonekar, P. P. (1998), “A Probabilistic Approach to Run-to-Run Control,” IEEE Transactions on Semiconductor Manufacturing, 11, 654–669.
   Web of Science ®Google Scholar
• Ingolfsson, A., and Sachs, E. (1993), “Stability and Sensitivity of an EWMA Controller,” Journal of Quality Technology, 25, 271–287.
   Web of Science ®Google Scholar
• Jen, C. H., and Jiang, B. C. (2008), “Combining On-line Experiment and Process Control Methods for Changes in a Dynamic Model,” International Journal of Production Research, 46, 3665–3682.
   Web of Science ®Google Scholar
• Lin, C. H., Tseng, S. T., and Wang, S. F. (2013), “Modified EWMA Controller Subject to Metrology Delay,” IIE Transactions, 45, 409–421.
   Web of Science ®Google Scholar
• Meeker, W. Q., and Escobar, L. A. (1998), Statistical Methods for Reliability Data, New York: Wiley.
   Google Scholar
• Moyne, J., Solakhian, V., Yershov, A., Anderson, M., and Mockler-Hebert, D. (2002), “Development and Deployment of a Multi-Component Advanced Process Control System for an Epitaxy Tool," in Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop, pp. 125–130.
   Google Scholar
• Pan, R., and Del Castillo, E. (2001), “Identification and Fine Tuning of Closed-Loop Processes Under Discrete EWMA and PI Adjustments,” Quality and Reliability Engineering International, 17, 419–427.
   Web of Science ®Google Scholar
• Qiu, P., and Xiang, D. (2014), “Univariate Dynamic Screening System: An Approach for Identifying Individuals with Irregular Longitudinal Behavior,” Technometrics, 56, 248–260.
   Web of Science ®Google Scholar
• R Development Core Team (2013), R: A Language and Environment for Statistical Computing, Vienna, Austria: R Foundation for Statistical Computing. Available at http://www.R-project.org.
   Google Scholar
• Sachs, E., Hu, A., and Ingolfsson, A. (1995), “Run by Run Process Control: Combining SPC and Feedback Control,” IEEE Transactions on Semiconductor Manufacturing, 8, 26–43.
   Web of Science ®Google Scholar
• Tseng, S. T., Chou, R. J., and Lee, S. P. (2002), “Statistical Design of Double EWMA Controller,” Applied Stochastic Models in Business and Industry, 18, 313–322.
   Web of Science ®Google Scholar
• Tseng, S. T., and Hsu, N. J. (2005), “Sample-Size Determination for Achieving Asymptotic Stability of a Double EWMA Control Scheme,” IEEE Transactions on Semiconductor Manufacturing, 18, 104–111.
   Web of Science ®Google Scholar
• Tseng, S. T., and Lin, C. H. (2009), “Stability Analysis of Single EWMA Controller Under Dynamic Models,” IIE Transactions, 41, 654–663.
   Web of Science ®Google Scholar
• Tseng, S. T., and Mi, H. C. (2014), “Quasi-Minimum Mean Square Error Run-to-Run Controller for Dynamic Models,” IIE Transactions, 46, 185–196.
   Web of Science ®Google Scholar
• Tseng, S. T., Mi, H. C., and Lee, I. C. (2016), “A Multivariate EWMA Controller for Linear Dynamic Processes,” Technometrics, 58, 104–115.
   Web of Science ®Google Scholar