References
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- Godyak, V.A.; Piejak, R.B.; and Alexandrovich, B.M. 1991. Ion flux and ion power losses at the electrode sheaths in a symmetrical RF discharge. J Appl Phys 69: 3455.
- Godyak V.A., and Piejak, R.B. 1990. In situ simultaneous radio frequency discharge power measurements. J Vac Sci Technol A(no. 8):3833.
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- Godyak, V.A.; Piejak, R.B.; and Alexandrovich, B.M. 1991. Electrical characteristics of parallel plate RF discharges in argon. IEEE Trans on Plasma Sci 19 (no. 4):680.
- Godyak, V.A.; Piejak, R.B.; and Alexandrovich, B.M. 1990. An experimental system for symmetric capacitive RF discharge studies. Rev Sci Instr 61: 2401.