Extended vacancy-type defects in silicon induced at low temperatures by electron irradiation

References

• AGARWAL , A. , HAYNES , T. E. , EAGLESHAM , D. J. , GOSSMANN , H. J. , JACOBSON , D. C. , POATE , J. M. and EROKHIN , Y. E. 1997 . Appl. Phys. Lett. , 70 : 3332
   Web of Science ®Google Scholar
• ALIPPI , P. and COLOMBO , L. 2000 . Phys. Rev. B , 62 : 1815
   Web of Science ®Google Scholar
• ARAI , N. , TAKEDA , S. and KOHYAMA , M. 1997 . Phys. Rev. Lett. , 78 : 4265
   Web of Science ®Google Scholar
• BOUROOIN , J. and CORBETT , J. W. Lattice Defects in Semiconductors 1974, Inrthute of Physics Conference Series . Edited by: Huntley , F. A. Vol. 23 , pp. 149 London : Institute of Physics .
   Google Scholar
• CHICHKTNE , M. P. , DE SOUZA , M. M. and NARAYANAN , E. M. S. 2002 . Phys. Rev. Lett. , 88 : 085501
   PubMed Web of Science ®Google Scholar
• CHOU , C. T. , COCKAYNE , D. J. H. , Zou , J. , KRINOHOJ , P. and JAGADISH , C. 1995 . Phys. Rev. B. , 52 : 17223
   Web of Science ®Google Scholar
• COENE , W. , BENDER , H. and AMELINCKX , S. 1985 . Phil. Mag. A , 52 : 369
   Google Scholar
• COLOMBEAU , B. , CRISTIANO , F. , ALTIBELLI , A. , BONAFOS , C. , BEN ASSAYAO , G. and CLAV- ERIE , A. 2001 . Appl. Phys. Lett. , 78 : 940
   Web of Science ®Google Scholar
• COOMER , B. J. , GOSS , J. P. , JONES , R. , OBERO , S. and BRIDDON , P. R. 1999 . Physica B , 274 : 505
   Google Scholar
• COWERN , N. and RAFFERTY , C. 2000 . Mater. Res. Soc. Bull. , 25 : 39
   Google Scholar
• CUSTER , J. S. , THOMPSON , M. O. , EAOLESHAM , D. J. , JACOBSON , D. C. and POATE , J. M. 1993 . J. Mater. Res. , 8 : 820
   Web of Science ®Google Scholar
• DABROWSKI , J. 2000 . Solid St. Phenomena , 71 : 23
   Google Scholar
• EAOLESHAM , D. J. , STOLK , P. A. , GOSSMANN , H. J. and POATE , J. M. 1994 . Appl. Phys. Lett. , 65 : 2305
   Web of Science ®Google Scholar
• EAOLESHAM , D. J. , VENEZIA , V. C. , GOSSMANN , H. J. and AOARWAL , A. 2000 . J. Electron MlcTosc. , 49 : 293
   Google Scholar
• ESTREICHER , S. K. , GHARAIBEH , M. , FEDDERS , P. A. and ORDEION , P. 2001 . Phys. Rev. Lett. , 86 : 1247
   PubMed Web of Science ®Google Scholar
• FEDINA , L. , GUTAIOVSIE , A. , VAN LANDUYT , J. and VANHELLEMONT , J. 1998 . Phil. Mag. A , 77 : 423
   Google Scholar
• FOLL , H. Lattice Defects in Semiconductors 1974 . Institute of Physics Conference Series . London . Edited by: Huntley , F. A. Vol. 23 , pp. 233 Institute of Physics .
   Google Scholar
• FUTTYOSHI , Y. , MIZUSAKI , Y. , MORIKAWA , K. , YAMAOISHI , H. , AOKI , Y. , KIHARA , H. and HARADA , Y. 1991 . Ultramicroscopy , 38 : 241
   Web of Science ®Google Scholar
• ITSUMI , M. , AKTYA , H. , UEKI , T. , TOMITA , M. and YAMAWAKI , M. 1920 . Jap. J. appl. Phys. , 35 : 812
   Google Scholar
• KIM , J. , KIRCHHOFF , F. , WILKINS , J. W. and KHAN , F. S. 2000 . Phys. Rev. Lett. , 84 : 503
   PubMed Web of Science ®Google Scholar
• KIRITANI , M. 1993 . Fundamentals of Radiation Damage , 220 Amsterdam : North-Holland .
   Google Scholar
• KOTO , K. , TAIEDA , S. , ICHIHASHI , T. and ILTIMA , S. 1997 . Appl. Phys. Lett. , 71 : 1661
   Web of Science ®Google Scholar
• MEYERS , S. M. , FOLLSTAEDT , D. M. , PETERSEN , O. A. , SEAGER , C. H. , STEIN , H. J. and WAMPLER , W. R. 1995 . Nucl. lustrum. Meth. B , 106 : 379
   Web of Science ®Google Scholar
• NEWMAN , R. C. 2000 . J. Phys.: condens. Matter , 12 : R335
   Web of Science ®Google Scholar
• OKAMOTO , P. R. , LAM , N. Q. and REHN , L. E. 1999 . Solid St. Phys. , 52 : 1
   Web of Science ®Google Scholar
• OSHIYAMA , A. , SATTO , M. and SUGINO , O. 1995 . Appl. Surf. Sci , 85 : 239
   Web of Science ®Google Scholar
• POLITY , A. , BORNER , F. , HUTH , S. , EICHLER , S. and KRAUSE-REHBERO , R. 1998 . Phys. Rev. B. , 58 : 10363
   Web of Science ®Google Scholar
• SETDMAN , D. N. , AVERBACK , R. S. , OKAMOTO , P. R. and BATLY , A. C. 1987 . Phys. Rev. Lett. , 58 : 900
   PubMed Web of Science ®Google Scholar
• SPENCE , J. C. H. 1981 . Experimental High Resolution Electron Microscopy , 347 Oxford University Press .
   Google Scholar
• TAKEDA , S. , KOHYAMA , M. and IBE , K. 1994 . Phil. Mag. A , 70 : 287
   Google Scholar
• TAKEDA , S. , KOTO , K. , IIJIMA , S. and ICHTHASHI , T. 1997 . Phys. Rev. Lett. , 79 : 2994
   Web of Science ®Google Scholar
• TAKEDA , S. and YAMASAKI , J. 1999 . Phys. Rev. Lett. , 83 : 320
   Web of Science ®Google Scholar
• TAKEDA , S. , YAMASAKI , J. and KTMURA , Y. 1999 . Physica B , 274 : 476
   Google Scholar
• WATKTNS , O. D. 1964 . Radiation Damage in Semiconductors, edited by P. Baruch , 97 Paris : Dunod .
   Google Scholar
• Huntley , F. A. , ed. Lattice Defects in Semiconductors 1974 . Institute of Physics Conference Series . London . Vol. 23 , pp. 1 Institute of Physics .
   Google Scholar
• WONO-LEUNO , J. , FATTMA , S. , JAOADISH , C. , FTTZ GERALD , J. D. , CHOU , C. T. , ZOU , J. and COCKAYNE , D. J. H. 2000 . J. appl. Phys. , 88 : 1312
   Web of Science ®Google Scholar
• YAMASAKI , J. , TAKEDA , S. and TSUDA , K. 2002 . Phys. Rev. B , 65 : 115213 – 115214 .
   Web of Science ®Google Scholar
• ZTLLOEN , H. and EHRHART , P. 1997 . Mater. Sci Forum , 258 : 503
   Google Scholar