3
Views
1
CrossRef citations to date
0
Altmetric
Original Articles

Comparison of calculated depth distributions of implanted ions for genuine and Ge-substituted InP targets

, &
Pages L49-L54 | Received 14 Nov 1985, Accepted 14 Jan 1986, Published online: 27 Sep 2006

References

  • Firsov , O. B. 1957 . Zh. eksp. teor. Fiz. , 33 : 696
  • 1958 . Soviet Phys. JETP , 6 : 534 (English translation)
  • 1959 . Zh. eksp. teor. Fiz. , 36 : 1517
  • 1959 . Soviet Phys. JETP , 36 : 1076 (English translation:)
  • Gibbons , J. F. , Johnson , W. S. and Mylroie , S. W. 1975 . Projected Range Statistics, Semiconductors and Related Materials, , second edition , Stroudsburg, Pennsylvania : Dowden, Hutchinson and Ross .
  • Hofker , W. K. , Oosthoek , D. P. , Koeman , N. J. and DeGrete , H. A. M. 1975 . Radiat. Effects , 24 : 223
  • Hou , M. and Robinson , M. T. 1979 . Appl. Phys. , 18 : 381
  • Jimenez-Rodriguez , J. J. , Rodriguez-Vidal , M. and Valles-Abarca , J. A. 1978 . Ann. Fis. , 74 : 208
  • Kalbitzer , S. and Oetzmann , H. 1980 . Radiat. Effects , 47 : 57
  • Karpuzov , D. S. 1981 . Appl. Phys. , 24 : 121
  • Lindhard , J. , Scharff , M. and Schiott , H. H. 1963 . Mat. Fys. Medd. Dan. Vid. Selsk. , 33 ( 14 )
  • Moliere , G. 1947 . Z. Naturf. , 2A : 133
  • Oberstar , J. D. , Schichijo , H. , Keever , M. , Streetman , B. G. , Bauer , J. E. and Williams , P. 1982 . Radiat. Effects , 61 : 109
  • Oen , O. and Robinson , M. T. 1976 . Nucl. Instrum. Meth. , 132 : 647
  • Robinson , M. T. and Torrens , I. M. 1974 . Phys. Rev. , B9 : 5008
  • Wilson , R. G. 1980 . Radiat. Effects , 46 : 414
  • Wilson , W. D. , Haggmark , L. G. and Biersack , J. P. 1977 . Phys. Rev. , B15 : 2458
  • Winterbon , K. B. 1972 . Radiat. Effects , 13 : 215
  • 1975 . Ion Implanted Range and Energy Deposition Distributions , Vol. 2 , New York : IFI/Plenum .
  • Winterbon , K. B. , Sigmund , P. and Sanders , J. B. 1970 . Mat. Fys. Medd. Dan. Vid. Selsk. , 37 ( 14. )

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.