The observation of oxidation-induced stacking faults and extrinsic gettering in silicon using X-ray diffraction topography

References

• Blech , I. A. and Meieran , E. S. 1967 . J. appl. Phys. , 38 : 2913
   Web of Science ®Google Scholar
• Booker , G. R. and Tunstall , W. J. 1966 . Phil. Mag. , 13 : 71
   Google Scholar
• Drum , C. M. and van Gelder , W. 1972 . J. appl. Phys. , 43 : 4465
   Google Scholar
• Fischer , W. A. and Amick , J. A. 1966 . J. electrochem. Soc. , 113 : 1054
   Google Scholar
• Ghostagore , R. N. 1970 . Appl. Phys. Lett. , 17 : 137
   Google Scholar
• Hu , S. M. 1973 . Atomic Diffusion in Semiconductors , Edited by: Shaw , D. 217 New York : Plenum .
   Google Scholar
• 1977 . J. vac. Sci. Technol. , 14 : 17
   Google Scholar
• Kawado , S. 1976 . Jap. J. appl. Phys. , 15 : 917
   Google Scholar
• Kawado , S. and Maruyama , M. 1972 . J. appl. Crystallogr. , 5 : 281
   Google Scholar
• Lawn , B. R. 1968 . Adv. X-ray Anal. , 11 : 385
   Google Scholar
• Mayer , A. 1970 . RCA Rev. , 31 : 414
   Google Scholar
• Meieren , E. S. and Blech , I. A. 1965 . J. appl. Phys. , 36 : 3162
   Google Scholar
• 1968 . Phys. Stat. sol. , 29 : 653
   Google Scholar
• Nozaki , T. , Itoh , Y. , Masui , T. and Abe , T. J. appl. Phys. , 59 2562
   Google Scholar
• Ravi , K. V. 1981 . Imperfections and Impurities in Semiconductor Silicon , New York : Wiley .
   Google Scholar
• Ravi , K. V. and Varker , C. J. 1974 . J. appl. Phys. , 45 : 263
   Web of Science ®Google Scholar
• Rozgonyi , G. A. , Petroff , P. M. and Read , M. H. 1975 . J. electrochem. Soc. , 122 : 1725
   Google Scholar
• Sanders , I. R. and Dobson , P. S. 1969 . Phil. Mag. , 20 : 881
   Google Scholar
• Schuttke , G. H. , Brack , K. and Hearn , E. W. 1971 . Microelectron. Reliability , 10 : 467
   Google Scholar
• Silcock , J. M. and Tunstall , W. J. 1964 . Phil. Mag. , 10 : 361
   Google Scholar
• Strack , H. , Mayer , K. R. and Kolbesen , B. O. 1979 . Solid St. Electron. , 22 : 135
   Web of Science ®Google Scholar