In situ crystallization of amorphous silicon in the transmission electron microscope

References

• Anderson , R. 1973 . J. Electrochem. Soc. , 120 : 1540
   Web of Science ®Google Scholar
• Batstone , J. L. 1990 . Phil. Mag. , 63 : 1037
   Google Scholar
• Cherns , D. 1974 . Phil. Mag. , 30 : 549
   Google Scholar
• Csepregi , L. , Mayer , J. W. and Sigmon , T. W. 1976 . Appl. Phys. Lett. , 29 : 92
   Web of Science ®Google Scholar
• Cullis , A. G. , Chew , N. G. , Webber , H. C. and Smith , D. J. 1984 . J. Cryst. Growth , 68 : 624
   Web of Science ®Google Scholar
• Donovan , E. P. , Spaepen , F. , Turnbull , D. , Poate , J. M. and Jacobson , D. C. 1985 . J. appl. Phys , 57 : 1795
   Web of Science ®Google Scholar
• Drosd , R. and Washburn , J. 1982 . J. appl. Phys. , 53 : 397
   Web of Science ®Google Scholar
• Evans , P. V. and Nelson , S. F. 1991 . J. appl. Phys. , 69 : 3605
   Web of Science ®Google Scholar
• Gibson , J. M. and Lanzerrotti , M. 1989 . Materials Research Society Symposium Proceedings, High Resolution Electron Microscopy of Materials , Vol. 139 , 355 Pittsburgh, Pennsylvania : Materials Research Society .
   Google Scholar
• Goodnick , S. M. , Ferry , D. K. , Wilmsen , C. W. , Liliental , Z. , Fathy , D. and Krivanek , O. L. 1985 . Phys. Rev. B , 32 : 8171
   Web of Science ®Google Scholar
• Hatalis , M. K. and Greve , D. W. 1988 . J. appl. Phys. , 63 : 2260
   Web of Science ®Google Scholar
• Hayzelden , C. , Batstone , J. L. and Camarrata , R. C. 1992 . Appl. Phys. Lett. , 60 : 225
   Web of Science ®Google Scholar
• Hull , R. , Bean , J. C. , Eaglesham , D. J. , Bonar , J. M. and Buescher , C. 1989 . Thin Solid Films , 183 : 117
   Web of Science ®Google Scholar
• Jackson , K. 1969 . Kinetics of Reaction in Ionic Systems , 229 New York : Plenum .
   Google Scholar
• Kennedy , E. , Cspregi , L. , Mayer , J. W. and Sigmon , T. W. 1977 . J. appl. Phys. , 48 : 4241
   Web of Science ®Google Scholar
• Morgiel , J. , Wu , W. I. , Chiang , A. and Sinclair , R. 1990 . Materials Research Society Symposium Proceedings, Polysilicon Thin Films and Interfaces , Vol. 182 , 191 Pittsburgh, Pennsylvania : Materials Research Society .
   Google Scholar
• Nagasima , N. and Kubota , N. 1977 . J. vac. Sci. Technol. , 14 : 54
   Web of Science ®Google Scholar
• Noma , T. , Yonehara , T. and Kumomi , H. 1991 . Appl. Phys. Lett. , 59 : 653
   Web of Science ®Google Scholar
• Olsen , G. L. 1985 . Materials Research Society Symposium Proceedings , Vol. 35 , 25 Pittsburgh, Pennsylvania : Materials Research Society .
   Google Scholar
• Paine , D. C. , Howard , D. J. , Stoffel , N. G. and Horton , J. A. 1990 . J. Mater. Res. , 5 : 1023
   Web of Science ®Google Scholar
• Priolo , F. , Batstone , J. L. , Poate , J. M. , Linnros , J. , Jacobson , D. C. and Thompson , M. O. 1988 . Appl. Phys. Lett. , 52 : 1043
   Web of Science ®Google Scholar
• Reiche , M. and Hopfe , S. 1990 . Ultramicroscopy , 33 : 41
   Web of Science ®Google Scholar
• Smith , D. A. , Tu , K. N. and Weiss , B. Z. 1987 . Ultramicroscopy , 23 : 405
   Web of Science ®Google Scholar
• Spaepen , F. 1978 . Acta metall. , 26 : 1167
   Google Scholar
• Sze , S. 1985 . Semiconductor Devices: Physics and Technology , 341 New York : Wiley .
   Google Scholar
• Wagner , S. , Wolff , S. H. and Gibson , J. M. 1990 . Materials Research Society Symposium Proceedings , Vol. 164 , 161 Pittsburgh, Pennsylvania : Materials Research Society .
   Google Scholar
• White , A. E. , Short , K. T. , Batstone , J. L. , Jacobson , D. C. , Poate , J. M. and West , K. W. 1987 . Appl Phys. Lett. , 50 : 19
   Web of Science ®Google Scholar
• Williams , J. S. 1983 . Surface Modification and Alloying , Edited by: Poate , J. M. , Foti , G. and Jacobson , D. C. New York : Plenum . and references therein
   Google Scholar
• Wu , I. W. , Chiang , A. , Fuse , M. , Ovecoglu , L. and Huang , T. Y. 1990 . Materials Research Society Symposium Proceedings, Polysilicon Thin Films and Interfaces , Vol. 182 , 107 Pittsburgh, Pennsylvania : Materials Research Society .
   Google Scholar