Role of boron in the structural and electronic properties of hydrogenated silicon films deposited by r.f. magnetron sputtering

References

• Bandyopadhyay , A. K. , Stiarma , S. N. , Banerjee , R. , Batabyal , A. K. and Barua , A. K. 1991 . J. Muter. Sci. Lett. , 10 : 1468
   Google Scholar
• Batabyal , A. K. , Chaudhuri , P. , Ray , S. and Rarua , A. K. 1984 . Thin Solid Films , 112 : 51
   Web of Science ®Google Scholar
• Bhusari , D. M. , Kumbhar , A. S. and Kshirsagar , S. T. 1993 . Phys. Rev. B , 47 : 6460
   Web of Science ®Google Scholar
• De , A. , Ghosh , S. , Ray , S. and Barua , A. K. Proceedings of the Sixth International Photovoltaics Science and Engineering Conference . 1992 . pp. 73
   Google Scholar
• Fripp , A. L. 1975 . J. appl. Phys. , 46 : 1240
   Web of Science ®Google Scholar
• Ghosh , S. , De , A. , Ray , S. and Barua , A. K. 1992 . J. appl. Phys. , 71 : 5205
   Web of Science ®Google Scholar
• Hamasaki , T. , Ueda , M. , Osaka , Y. and Hirose , M. 1983 . J. non-crystalline solids , 59–60 : 811
   Web of Science ®Google Scholar
• Kshirsagar , S. T. and Lannin , J. S. 1982 . Phys. Rev. B , 25 : 2916
   Web of Science ®Google Scholar
• Lannin , J. S. 1984 . Semicond. Semimetals B , 21 : 159
   Web of Science ®Google Scholar
• Matsuda , A. , Yamasaki , S. , Nakayama , K. , Okushi , H. , Tanaka , K. , Iizima , S. , Matsumura , M. and Yamamoto , H. 1980 . Jap. J. appl. Phys. , 19 : L305
   Web of Science ®Google Scholar
• Moustakas , T. D. , Maruska , H. P. and Friedman , R. 1985 . J. appl. Phys. , 58 : 983
   Web of Science ®Google Scholar
• Prasad , Kshem. 1991 . Universite de Neuchǎtel, Institut de Microtechnique, Neuchǎtel . Thesis
   Google Scholar
• Richter , H. and Ley , L. 1981 . J. appl. Phys. , 52 : 7281
   Web of Science ®Google Scholar
• Sato , K. , Adachi , K. , Hayashi , Y. and Mizuhashi , M. Proceedings 12th IEEE Photovoltaic Specialists' conference . pp. 267 New York : IEEE .
   Google Scholar
• Sharma , S. N. , Bandyopadhyay , A. K. , Banerjee , R. , Batabyal , A. K. , Barua , A. K. and Abbi , S. C. 1991 . Phys. Rev. B , 43 : 4503
   Web of Science ®Google Scholar
• Shimada , T. , Katayama , Y. , Nakagawa , K. , Matsubara , H. , Migitaka , M. and Maruyama , E. 1983 . J. non-crystallline Solids , 59–40 : 783
   Web of Science ®Google Scholar
• Tsuge , K. , Kondo , M. , Nishimura , K. , Fukada , N. , Tawada and Hamakawa , Y. Proceedings of the First Photovoltaics Science and Engineering Conference Kobe . 1984 . pp. 179
   Google Scholar
• Usui , S. and Kikuchi , M. 1979 . J. non-crystalline Solids , 34 : 1
   Web of Science ®Google Scholar
• Vanier , P. E. , Tafto , J. , Rajeswaran , G. and Kampas , F. J. 1984 . J. non-crystalline Solids , 66 : 31
   Web of Science ®Google Scholar
• Yang , G. , Bai , P. , Tong , B. Y. , Wong , S. K. and Hill , I. 1989 . Solid St. Commun. , 72 : 159
   Web of Science ®Google Scholar
• Yang , G. , Bai , P. , Uu , Y. J. , Tong , B. Y. , Wong , S. K. , Du , J. and Hill , I. Materials Issues in Microcrystalline Semiconductors, Materials Research Society Symposium Proceedings . Vol. 164 , pp. 321 Pittsburgh : Pennsylvania Materials Research Society .
   Google Scholar