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Radiation Effects Volume 43, 1979 - Issue 4-5
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Original Articles

Implant ion collection in the presence of radiation enhanced diffusion and preferential sputtering of implant

G. Carter Department of Electrical Engineering, University of Salford, Salford, UK, M5 4WT
,
R. Webb Department of Electrical Engineering, University of Salford, Salford, UK, M5 4WT
&
R. Collins Department of Mathematics, University of Salford, Salford, UK, M5 4WT
Pages 125-132 | Published online: 19 Aug 2006

References

  • Collins , R. and Carter , G. 1975 . Rad Effects , 26 : 181
  • Carter , G. and Collins , R. 1976 . Rad Effects , 28 : 123
  • Biersack , J. P. 1973 . Ion Surface Interactions, Sputtering and Related Phenomena , Edited by: Behrisch , R. Gordon and Breach .
  • Collins , R. 1978 . Rad Effects , 37 : 13
  • Webb , R. , Carter , G. and Collins , R. 1978 . Rad Effects ,
  • Carter , G. , Webb , R. , Collins , R. and Thompson , D. A. 1979 . Rad Effects ,
  • Pickering , H. W. 1976 . J Vac Sci Technol , 13 : 611
  • Ho , P. S. 1978 . Surface Science , 72 : 253
  • Arita , M. and Someno , M. Proc VIIth Int Vac Cong and III Int Conf Solid Surfaces . Vienna. Vol 3 , pp. 2511
  • Chu , W. K. , Howard , J. K. and Lever , R. F. 1976 . J Appl Phys , 47 : 4500
  • Poate , J. M. , Brown , W. L. , Homer , R. , Augustynlak , W. M. , Mayer , J. W. , Tu , K. N. and vander Weg , W. F. 1976 . Nucl Instrum Methods , 132 : 345
  • Liau , Z. L. , Brown , W. L. , Homer , R. and Poate , J. M. 1977 . Appl Phys Letters , 30 : 626
  • Liau , Z. L. , Mayer , J. W. , Brown , W. L. and Poate , J. M. 1979 . J Appl Phys , (to be published)
  • Liau , Z. L. and Mayer , J. W. 1979 . Ion Implantation in Materials Science and Technology , Edited by: Hirvonen , J. K. New York : Academic Press Inc . chapter 2
  • Liau , Z. L. and Mayer , J. W. 1978 . J Vac Sci Technol , 15 ( 5 ) : 1629
  • Haff , P. K. 1977 . Appl Phys Letters , 31 : 259
  • Haff , P. K. and Switkowski , Z. E. 1977 . J Appl Phys , 48 ( 33 ) : 83
  • Donnelly , S. E. , Webb , R. , Armour , D. G. and Carter , G. Proc 7th Int Conf on Atomic Coll Sol . Moscow.
  • Cárter , G. , Baruah , J. N. and Grant , W. A. 1972 . Rad Effects , 16 : 107
  • Wittmaack , K. , Blank , P. and Wach , W. 1978 . Rad Effects , 39 : 81
  • Blank , P. , Wittmaack , K. and Schulz , F. 1976 . Nucl Instrum Methods , 132 : 387
  • Robinson , M. T. 1963 . Private communication
  • Fischer , G. , Colligon , J. S. and Hill , A. E. Proc 7th Int Conf on Atomic Coll Sol. Moscow.
  • Carter , G. , Colligon , J. S. and Leck , J. H. 1962 . Proc Phys Soc , 79 : 299
  • Radzabov , T. D. and Iskanderova , Z. A. 1978 . J Tech Phys (USSR) , 48 : 1957

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