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Original Articles

A comparison of three versions of sigmund's model of sputtering using experimental results

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Pages 145-151 | Received 07 Feb 1984, Published online: 19 Aug 2006

References

  • Sigmund , P. 1969 . Phys. Rev. , 184 : 383
  • Bohdansky , J. 1983 . Proc. Symp. Surface Science . 1983 , Obertraun, Austria. Edited by: Braun , P. pp. 127 Vienna, , Austria : Institut f. Allgemeine Physik, Technische Universität Wien . Karlsplatz 13, A-1040
  • Yamamura , Y. , Matsunami , N. and Itoh , N. 1982 . Rad. Eff. Lett. , 68 : 83
  • Gries , W. H. and Strydom , H. J. 1984 . A Table of Normalized Sputtering Yields for Monoelemental Polycrystalline Targets Report SMAT 3, NIMR/CSIR, P.O. Box 395, Pretoria 0001 South Africa.
  • Lindhard , J. , Scharff , M. and SchiøpHtt , H. E. 1963 . Dan. Vid. Selsk. Mat. Fys. Medd. , 33 ( 14 )
  • Bohdanksy , J. 1980 . J. Nucl. Materials , 93/94 : 44
  • Gibbons , J. F. , Johnson , W. S. and Mylroie , S. 1975 . Projected Range Statistics , 2nd ed , Stroudsburg, Penn., , U.S.A. : Dowden, Hutchinson & Ross Inc. .
  • Bohdansky , J. 1983 . Int. Conf. Atomic Collisions in Solids . 1983 . Bad Iburg, , Germany

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