Advanced search
Publication Cover
Journal of the American Statistical Association Volume 93, 1998 - Issue 441
Submit an article Journal homepage
80
Views
12
CrossRef citations to date
0
Altmetric
Application and Case Study

Achieving Uniformity in a Semiconductor Fabrication Process using Spatial Modeling

Jacqueline M. Hughes-Oliver Department of Statistics, North Carolina State University, Raleigh, NC, 27695, USA
,
Jye-Chyi Lu Department of Statistics, North Carolina State University, Raleigh, NC, 27695, USA
,
Joseph C. Davis Semiconductor Process and Device Center, Texas Instruments, Inc., Dallas, TX, 75265, USA
&
Ronald S. Gyurcsik Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, NC, 27695, USA
Pages 36-45 | Received 01 Aug 1995, Published online: 17 Feb 2012

References

  • Bartelink , D. J. 1994 . “Statistical Metrology: At the Root of Manufacturing Control” . Journal of Vacuum Science Technology Ser. B , 12 : 2785 – 2794 .
  • Cressie , N. A. C. 1991 . Statistics for Spatial Data , New York : Wiley .
  • Davis , J. C. , Gyurcsik , R. S. and Lu , J. C. 1993 . “Application of Semi-Empirical Model Building to the RTCVD of Polysilicon,” . In Statistics in the Semiconductor Industry: Case Studies of Process/Equipment Characterization , Edited by: Czitrom , V. and Spagon , P. Vol. 2 , 202 – 214 . Austin , TX : Sematech .
  • Diggle , P. J. , Liang , K. and Zeger , S. L. 1994 . Analysis of Longitudinal Data , London : Oxford University Press .
  • Guo , R. and Sachs , E. 1993 . “Modeling, Optimization and Control of Spatial Uniformity in Manufacturing Processes” . IEEE Transactions on Semiconductor Manufacturing , 6 : 41 – 57 .
  • Handcock , M. S. and Wallis , J. R. 1994 . “An Approach to Statistical Spatial-temporal Modeling of Meteorological Fields” . Journal of the American Statistical Association , 89 : 368 – 378 .
  • Lin , K. K. and Spanos , C. J. 1990 . “Statistical Equipment Modeling for VLSI Manufacturing: An Application to LPCVD” . IEEE Transactions, on Semiconductor Manufacturing , 3 : 216 – 229 .
  • Mardia , K. V. and Marshall , R. J. 1984 . “Maximum Likelihood Estimation of Models for Residual Covariance in Spatial Regression” . Biometrika , 71 : 135 – 146 .
  • Nair , V. J. 1992 . “Taguchi's Parameter Design: A Panel Discussion” . Technometrics , 34 : 127 – 161 .
  • Ozturk , M. C. , Sorrell , F. Y. and Wortman , J. J. 1991 . “Manufacturability Issues in Rapid Thermal Chemical Vapor Deposition” . Transactions on Semiconductor Manufacturing , 4 : 155 – 165 .
  • Perkins , R. H. , Riley , T. J. and Gyurcsik , R. S. 1995 . “Thermal Uniformity and Stress Minimization During Rapid Thermal Processes” . Transactions on Semiconductor Manufacturing , 8 : 272 – 279 .
  • Stewart , J. 1976 . “Positive Definite Functions and Generalizations: An Historical Survey” . Rocky Mountain Journal of Mathematics , 6 : 409 – 434 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.