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Short Paper

A wide‐g range silicon piezoresistive accelerometer

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Pages 873-878 | Received 04 Aug 1994, Accepted 28 Mar 1995, Published online: 04 May 2011

References

  • Allen , H.V. , Terry , S.C. and Debruin , D.W. 1990 . “Accelerometer System with Built‐in Testing,” . Sensors and Actuators, A‐Physical , 21 ( 1–3 ) : 381 – 386 .
  • Allen , H.V. , Terry , S.C. and Debruin , D.W. 1989 . “Accelerometer System with Self‐Testable Features,” . Sensors and Actuators , 20 ( 1–2 ) : 153 – 161 .
  • Bassous , E. 1978 . “Fabrication of Novel Three‐Dimension Micro‐Structure by the Anisotropic Etching of (100) and (110) Silicon,” . IEEE Transactions on Electron Device , 25 ( 10 ) : 1178
  • Boxehorn , B. and Greiff , P. 1990 . “Monolithic Silicon Accelerometer,” . Sensors and Actuators , 21–23 : 273 – 277 .
  • Chang , S.C. , Putty , M.W. , Hicks , D.B. and Li , C.H. 1990 . “Resonant‐Bridge Two‐Axis Microaccel‐erometer,” . Sensors and Actuators , 21–23 : 342 – 345 .
  • Kobayashi , H. and Hosokawa , Y. 1990 . “A Study of a Capacitance‐Type Position Sensor for Automotive Use,” . Sensors and Actuators , 24 : 27 – 34 .
  • Kung , J.T. and Lee , H.S. 1992 . “An Integrated Air‐Gap‐Capacitor Pressure Sensor and Digital Readout with Sub‐100 Attofarad Resolution,” . Journal of Micro electromechanical Systems , 1 ( 3 ) : 121 – 128 .
  • Macdonald , G.A. 1990 . “A Review of Low Cost Accelerometer for Vehicle Dynamics,” . Sensors and Actuators , 21–23 : 303 – 307 .
  • Middlehoek , S. and Audet , S.A. 1989 . Silicon Sensors , New York : Academic Press INC .
  • Peterson , K.E. 1982 . “Silicon as a Mechanical Material,” . Proceeding of the IEEE , 70 ( 5 )
  • Roylance , L.M. and Jame , B.A. 1979 . “A Batch‐Fabrication Silicon Accelerometer,” . IEEE Transactions on Electron Device , 26 ( 12 ) : 1911
  • Rudolf , F. , Jornod , A. , Bergqvist , J. and Leuthold , H. 1990 . “Precision Accelerometer with μg Resolution,” . Sensors and Actuators , 21–23 : 297 – 302 .
  • Satchell , D.W. and Greenwood , J.C. 1989 . “A Thermal‐Excited Silicon Accelerometer,” . Sensors and Actuators , 17 : 241 – 245 .
  • Seidel , H. , Reidel , H. , Kolbeck , R. , Muck , G. , Kupke , W. and Koniger , M. 1990 . “Capacitive Silicon Accelerometer with Highly Symmetrical Design,” . Sensors and Actuators , 21–23 : 312 – 315 .
  • Yamada , K. , Higuchi , K. and Tanigawa , H. 1990 . “A Novel Silicon Accelerometer with a Surrounding Mass Structure,” . Sensors and Actuators , 21–23 : 308 – 311 .
  • Correspondence addressee

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