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Journal of the Chinese Institute of Engineers Volume 23, 2000 - Issue 2
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Original Articles

Fabrication and characterization of PZT thin film ultrasonic devices

Chung Cheng Chang Department of Electrical Engineering, National Taiwan Ocean University, Keelung, Taiwan
&
Kau Hsiung Chen Department of Electrical Engineering, National Taiwan Ocean University, Keelung, Taiwan
Pages 179-184 | Received 27 Apr 1999, Accepted 30 Sep 1999, Published online: 03 Mar 2011

References

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  • Horwitz , S. , Grabowski , K.S. , Chrisey , D.B. and Leuchtner , R.E. 1991 . “In Situ Deposition of Epitaxial PbZrxTi1‐xO3, Thin Film by Pulsed Laser Deposition,” . Applied Physics Letter , 59 ( 13 ) : 1565 – 1567 .
  • Vasant , K. , Sayer , M. , Pascual , R. , AMM , D.T. and Wu , Z. 1991 . “Lead Zirconate Titanate Films by Rapid Thermal Processing,” . Applied Physics Letter , 58 ( 11 ) : 1161 – 1163 .
  • Potter , B.G. , Sinclair , M.B. and Dimos , D. 1993 . “Electro‐Optical Characterization of Pb(Zr, Ti)O3 Thin Films by Waveguide Refractometry,” . Applied Physics Letter , 63 ( 16 ) : 2180 – 2185 .
  • Correspondence addressee

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