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Surface Engineering Volume 32, 2016 - Issue 3: Characterisation
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Original Articles

Structural property investigation on obliquely deposited thick Al films

Z. Z. LiKey Laboratory of Optical System Advanced Manufacturing Technology, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun Institute of Optics, Changchun130033, China;University of the Chinese Academy of Sciences, Beijing100039, ChinaCorrespondence[email protected]
,
J. S. GaoKey Laboratory of Optical System Advanced Manufacturing Technology, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun Institute of Optics, Changchun130033, China
,
H. G. YangKey Laboratory of Optical System Advanced Manufacturing Technology, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun Institute of Optics, Changchun130033, China
,
Y. C. WangKey Laboratory of Optical System Advanced Manufacturing Technology, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun Institute of Optics, Changchun130033, China;University of the Chinese Academy of Sciences, Beijing100039, China
&
T. T. WangKey Laboratory of Optical System Advanced Manufacturing Technology, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun Institute of Optics, Changchun130033, China
Pages 185-189 | Published online: 01 Feb 2016

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