Advanced search
Publication Cover
Aerosol Science and Technology Volume 36, 2002 - Issue 5
Submit an article Journal homepage
782
Views
4
CrossRef citations to date
0
Altmetric
Original Articles

Exhaust Aerosol of a Plasma Enhanced CVD System: I. Size Distribution Measurements

Bruce R. Forsyth Particle Technology Laboratory, Mechanical Engineering Department, University of Minnesota, Minneapolis, Minnesota
&
Benjamin Y. H. Liu Particle Technology Laboratory, Mechanical Engineering Department, University of Minnesota, Minneapolis, Minnesota
Pages 515-525 | Published online: 30 Nov 2010

  • Barnes , M. S. , Colter , T. J. and Elta , M. E. 1987 . Large-Signal Time-Domain Modeling of Low-Pressure RF Glow Discharges . J. Appl. Phys. , 61 : 81 – 89 .
  • Barnes , M. S. , Keller , J. H. , Forster , J. C. , O'Neill , J. A. and Coultas , D. K. 1992 . Transport of Dust Particles in Glow-Discharge Plasmas . Phys. Rev. Lett. , 68 : 313 – 316 .
  • Bohme , W. , Kohler , W. E. , Romheld , M. , Veprek , S. and Seebock , R. J. 1994 . Observation of Dust Particle Growth and Fallout in RF-Excited Silane Discharges . IEEE Trans. Plasma Sei. , 22 : 110 – 115 .
  • Bouchoule , A. , Plain , A. , Boufendi , L. , Blondeau , J. Ph. and Laure , C. 1991 . Particle Generation and Behavior in a Silane-Argon Low-Pressure Discharge Under Continuous or Pulsed Radio-Frequency Excitation . J. Appl. Phys. , 70 : 1991 – 2000 .
  • Bowling , R. A. and Larabee , G. B. 1989 . Behavior and Detection of Particles in a Vacuum . J. Electrochem. Soc. , 136 : 497 – 502 .
  • Carlile , R. N. , Geha , S. , O'Hanlon , J. F and Stewart , J. C. 1991 . Electrostatic Trapping of Contamination Particles in a Process Plasma Environment . Appl. Phys. Lett. , 59 : 1167 – 1169 .
  • Forsyth , B. R. 1999 . Aerosol Generation and Charging Phenomena in Plasma Enhanced Chemical Vapor Deposition , Minneapolis, MN : University of Minnesota . PhD. thesis
  • Fukuzawa , T , Shiratani , M. and Watanabe , Y. 1993 . Novel In Situ Method to Detect Subnanometer-Sized Particles in Plasmas and its Application to Particles in Helium-Diluted Silane Radio Frequency Plasmas . AppL Phys. Lett. , 64 : 3098 – 3100 .
  • Geha , S. G. , Carlile , R. N. , O'Hanlon , J. F and Selwyn , G. S. 1991 . The Dependenc e of Contamination Particle Traps on Wafer Material and Topography . J. Appl. Phys. , 72 : 374 – 383 .
  • Hidy , G. M. and Brock , J. R. 1965 . Some Remarks About the Coagulation of Aerosol Particles by Brownian Motion . J. Colloid Interface Sei. , 20 : 477 – 491 .
  • Lai , F. S. , Friedlander , S. K. , Pich , J. and Hidy , G. M. 1972 . The SelfPreserving Particle Size Distribution for Brownian Coagulation in the FreeMolecule Regime . J. Colloid Interface Sei. , 39 : 395 – 405 .
  • Lee , K. R. , Sundaram , K. B. and Maolcha , D. C. 1993 . Deposition Parameters Studies of Silicon Nitride Films Prepared by Plasma-Enhanced CVD Process Using Silane-Ammonia . Mat. Sci , 4 : 283 – 287 .
  • Lee , K. W. , Chen , H. and Gieseke , J. A. 1984 . Log-Normally Preserving Size Distribution for Brownian Coagulation in the Free-Molecule Regime . Aerosol Sci. Technol. , 3 : 53 – 62 .
  • Lee , K. W. , Curtis , L. A. and Chen , H. 1990 . An Analytical Solution to Free Molecule Aerosol Coagulation . Aerosol Sci. Technol. , 12 : 457 – 462 .
  • Matsoukas , T and Russell , M. 1995 . Particle Charging in Low-Pressure Plasmas . J. Appl. Phys. , 77 : 4285 – 4292 .
  • Murthy , T. U. M. S. , Miyamoto , N. , Shimbo , M. and Nishizawa , J. 1975 . GasPhase Nucleation During the Thermal Decomposition of Silane in Hydrogen . J. Crystal Growth , 33 : 1 – 17 .
  • Nijhawan , S. 1999 . Experimental and Computational Study of Particle Nucleation, Growth and Transport during Low Pressure Decomposition of Silane , Minneapolis, MN : University of Minnesota . Ph.D. Thesis
  • O'Hanlon , J. 1994 . The Effects of Electrostatic, Molecular Drag and Gravitational Forces on the Behavior of Particle Clouds in an RF Discharge . IEEE Trans. Plasma Sci. , 22 : 151 – 156 .
  • Selwyn , G. S. , Heidenreich , J. E. and Haller , K. L. 1990a . Particle Trapping Phenomena in Radio Frequency Plasmas . Appl. Phys. Lett. , 57 : 1876 – 1878 .
  • Selwyn , G. S. , McKillop , J. S. , Haller , K. L. and Wu , J. J. 1990b . In Situ Plasma Contamination Measurements by HeNe Laser Light Scattering: A Case Study . J. Vac. Sci. Technol , A8 : 1726 – 1731 .
  • Selwyn , G. S. , Singh , J. and Bennett , R. S. 1989 . In Situ Laser Diagnostic Studies of Plasma-Generated Particulate Contamination . J. Vac. Sei. Technol , A7 : 2758 – 2765 .
  • Spears , K. G. , Robinson , T. J. and Roth , R. M. 1986 . Particle Distributions and Laser-Particle Interactions in an Rf Discharge of Silane . IEEE Trans. Plasma Sci , PS-14 : 179 – 187 .
  • Watanabe , Y and Shiratani , M. 1993 . Growth Kinetics and Behavior of Dust Particles in Silane Plasmas . Jpn. J. Appl. Pkys. , 32 : 3074 – 3080 .
  • Watanabe , Y , Shiratani , M. and YamasWta , M. 1992 . Observation of Growing Kinetics of Particles in a Helium-Diluted Silane Rf Plasma . Appl. Pkys. Lett. , 61 : 1510 – 1512 .
  • Ye , Y. 1992 . Condensation Induced Particle Formation During Vacuum Pump Down , Minneapolis, MN : University of Minnesota . Ph.D. Thesis

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.