- Ahn , K.-H. and Ahn , J. H. 1998 . Numerical Simulation of Particle Motion through a Critical Orifice . J. Aerosol Sci. , 29 : 8833 – 8834 .
- Bae , G. N. , Kinney , P. D. , Pui , D. Y. H. and Liu , B. Y. H. 1998 . Investigation of Aerosol Spatial Distributions Downstream of a Critical Orifice at Low Pressure . Aerosol Sci. Technol. , 28 : 479 – 488 .
- Chang , C. Y and Sze , S. M. 1996 . VLSI Technology , Singapore : McGraw-Hill .
- Chen , D.-R. and Pui , D. Y. H. 1995 . Numerical and Experimental Studies of Particle Deposition in a Tube with a Conical Contraction-Laminar Flow Regime . J. Aerosol Set. , 26 : 563 – 574 .
- Hattori , T. 1990 . Contamination Control: Problems and Prospects . Solid State Technol , 33 : 81 – 88 .
- Kanaoka , C. , Emi , H. and Aikura , T. 1979 . Collection Efficiency of Aerosols by Micro-Perforated Plates . J. Aerosol Sci. , 10 : 29 – 41 .
- Kinney , P. D. , Bae , G. N. , Pui , D. Y. H. and Liu , B. Y. H. 1996 . Particle Behavior in Vacuum Systems: Implications for In-Situ Particle Monitoring in Semiconductor Processing Equipment . J. Inst. Environ. Sci. , November/December : 40 – 45 .
- Lee , L. J. , Ottino , J. M. , Ranz , W. E. and Macosko , C. W. 1980 . Impingement Mixing in Reaction Injection Molding . Polym. Eng. Sci. , 20 : 868 – 874 .
- Pui , D. Y. H. , Romay-Novas , F and Liu , B. Y. H. 1987 . Experimantal Study of Particle Deposition in Bends of Circular Cross Section . Aerosol Sci. Technol. , 7 : 301 – 315 .
- Romay-Novas , F. and Pui , D. Y. H. 1988 . Generation of Monodisperse Aerosol s in the 0.1-1.0 µm Diameter Range Using a Mobility ClassificationInertial Impaction Technique . Aerosol Sci. Technol. , 9 : 123 – 131 .
- Roth , A. 1990 . Vacuum Technology , Amsterdam : Elsevier .
- Sandell , D. J. , Macosko , C. W. and Ranz , W. E. 1985 . Visualization Technique for Studying Impingement Mixing at Representative Reynolds Numbers . Polym. Proc. Eng. , 3 : 57 – 70 .
- Tucker , C. L. III and Suh , N. P. 1980 . Mixing for Reaction Injection Molding. I. Impingement Mixing of Liquid . Polym. Eng. Sci. , 20 : 875 – 886 .
- Vanderpool , R. W. and Rubow , K. L. 1984 . TSI Q. , 10 : 3 – 6 .
- Wood , P. , Hrymak , A. , Yeo , R. , Johnson , D. and Tyagi , A. 1991 . Experimental and Computational Studies of the Fluid Mechanics in an Opposed Jet Mixing Head . Phys. Fluids A. , 3 : 1362 – 1368 .
Free access
A Novel Method for Producing Spatially Uniform Aerosols in a Low Pressure Environment
Reprints and Corporate Permissions
Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?
To request a reprint or corporate permissions for this article, please click on the relevant link below:
Academic Permissions
Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?
Obtain permissions instantly via Rightslink by clicking on the button below:
If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.
Related research
People also read lists articles that other readers of this article have read.
Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.
Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.