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Aerosol Science and Technology Volume 36, 2002 - Issue 2
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Original Articles

A Numerical Study of the Effects of a Moving Operator on Particles in a Cleanroom with a Curtain

Wu-Shung Fu Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan, Republic of China
,
Shih-Fa Chen Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan, Republic of China
&
Suh-Jenq Yang Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan, Republic of China
Pages 154-161 | Published online: 30 Nov 2010

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  • Yamamoto , T. 1990 . Airflow Modeling and Particle Control by Vertical Laminar Flow, Particle Control for Semiconductor Manufacturing , Edited by: Donovan , R. P. 301 – 323 . New York : Marcel Dekker Inc. .
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