162
Views
0
CrossRef citations to date
0
Altmetric
Original Articles

Large-Scale Filter Testing for High-Purity Gas Supply Systems Used in Semiconductor Processing

, &
Pages 1-14 | Received 28 Apr 1987, Accepted 31 Aug 1987, Published online: 07 Jun 2007

REFERENCES

  • Accomazzo , M. A. , Rubow , K. L. , and Liu , B. Y. H. ( 1984 ). Solid State Technology ,
  • Fraser , R. P. , and Eisenklam , P. ( 1956 ). Trans. Inst. Chem. Eng. 34 : 294 – 315 .
  • Grassel , E. E. ( 1976 ). In Fine Particles: Aerosol Generation, Measurement, Sampling and Analysis. ( B. Y. H. Liu , ed. ). Academic Press , New York , pp. 145 – 172 .
  • Hinze , J. O. ( 1955 ). AI Che J. 1 : 289 – 295 .
  • Kasper , G. , and Wen , H. Y. ( 1986 ). Aerosol Sci. Technol. 5 : 167 .
  • Kerker , M. ( 1975 ). Adv. Colloid Interface Sci. 5 : 105 – 172 .
  • Krzeczkowski , S. A. ( 1980 ). Int. J. Multiphase Flow 6 : 227 – 239 .
  • Liu , B. Y. H. , and Lee , K. W. ( 1975 ). Am. Ind. Hyg. Assoc. J. 36 : 861 – 865 .
  • Liu , B. Y. H. , Pui , D. Y. H. , and Rubow , K. L. ( 1983 ). In Aerosols in the Mining and Industrial Work Environments , Vol. 3 ( V. A. Marple and B. Y. H. Liu , eds. ). Ann Arbor Science , Ann Arbor , MI , p. 989 .
  • Mendenhall , W. , Scheaffer , R. L. , and Wackerly , D. D. ( 1981 ). Mathematical Statistics with Applications , Duxbury Press , Boston , MA .
  • Pui , D. Y. H. , and Liu , B. Y. H. ( 1978 ). Presented at the Symposium on Advances in Particle Sampling and Measurement, Asheville, NC.
  • Raabe , O. G. ( 1976 ). In Fine Particles: Aerosol Generation, Measurement, Sampling and Analysis , ( B. Y. H. Liu , ed. ). Academic Press , New York , pp. 57 – 110 .
  • Rubow , K. L. , and Liu , B. Y. H. ( 1984 ). Presented at 30th Annual Technical Meeting of the Institute of Environmental Science, Orlando, FL.
  • Sem , G. J. ( 1980 ). Presented at 8th Annual Conference, Gesellschaft fur Aerosolforschung, Schmallenberg, West Germany.
  • Sinclair , D. ( 1982 ). Atmos. Environ. 16 : 955 – 958 .
  • Thorogood , R. M. , and Schwarz , A. ( 1986 ). Presented at 32nd Annual Technical Meeting of the Institute of Environmental Sciences, Dallas, TX.
  • Van Slooten , R. A. ( 1986 ). Microcontamination 32 – 38 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.