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Original Articles

A Sectional Model for Investigating Microcontamination in a Rotating Disk CVD Reactor

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Pages 1161-1170 | Received 06 Jan 2004, Accepted 04 Oct 2004, Published online: 01 Aug 2012

REFERENCES

  • Breiland , W. G. and Evans , G. H. 1991 . Design and Verification of Nearly Idea] Flow and Heat Transfer in a Rotating Disk Chemical Vapor Deposition Reactor . J. Electrochem. Soc. , 138 : 1806 – 1816 .
  • Coltrin , M. E. , Kee , R. J. and Evans , G. H. 1989 . Mathematical Model of the Fluid Mechanics and Gas-Phase Chemistry in a Rotating Disk Chemical Vapor Deposition Reactor . J. Electrochem. Soc. , 136 : 819 – 829 .
  • Coltrin , M. E. , Kee , R. J. , Evans , G. H. , Meeks , E. , Rupley , F. M. and Grcar , J. F. 1991 . SPIN (Version 3.83): A FORTRAN Program for Modeling One-Dimensional Rotating-Disk/Stagnation-Flow Chemical Vapor Depostion Reactors Sandia National Laboratories. . Report SAND91–8003
  • Friedlander , S. K. 1977 . Smoke. Dust and Haze New York : John Wiley & Sons. .
  • Gelbard , F. , Tambour , Y. and Seinfeld , J. H. 1980 . Sectional Representations for Simulating Aerosol Dynamics . J. Colloid Interface Sci. , 76 : 541 – 556 .
  • Hall , R. J. , Smooke , M. D. and Colket , M. B. 1997 . “ Predictions of Soot Dynamics in Opposed Jet Diffusion Flames. ” . In Physical and Chemical Aspects of Combustion: A Tribute to Irvin Classman Edited by: Sawyer , R. F. and Dryer , F. L. 189 – 230 . Amsterdam : Combustion Science and Technology Book Series. Gordon and Breach. .
  • Hitchman , M. L. , Curtis , B. J. , Brunner , H. R. and Eichenberger , V. 1977 . “ The Study of Chemical Vapor Deposition Processes with Rotating Disks. ” . In Physicochemical Hydrodynamics Edited by: Spalding , D. B. Vol. 2 , 1021 – 1029 . London : Advanced Publications. .
  • Ho , P. , Coltrin , M. E. and Breiland , W. G. 1994 . Laser-Induced Fluorescence Measurements and Kinetic Analysis of Si Atom Formation in a Rotating Disk Chemical Vapor Deposition Reactor . J. Phvs. Chem. , 98 : 10138 – 10147 .
  • Jensen , K. F. and Einset , E. O. 1991 . Ann Rev. Fluid Mech. , 23 : 197 – 232 .
  • Kremer , D. R. , Davis , R. W. , Moore , E. F. , Maslar , J. E. , Burgess , D. M. and Ehrman , S. H. 2003 . An Investigation of Particle Dynamics in a Rotating Disk Chemical Vapor Deposition Reactor . J. Electrochem. Soc. , 150 ( 2 ) : G127 – G139 .
  • Landgrebe , J. and Pratsinis , S. 1989 . Gas-Phase Manufacture of Particulates: Interplay of Chemical Reaction and Aerosol Coagulation in the Free-Molecular Regime . Ind. Eng. Chem. Res. , 28 : 1474 – 1481 .
  • Pollard , R. and Newman , J. 1980 . Silican Deposition on a Rotating Disk . J. Electrochem. Soc. , 127 : 744 – 752 .
  • Warren , D. R. and Seinfeld , J. H. 1985 . Simulation of Aerosol Size Distribution Evolution in Systems with Simultaneous Nucleation, Condensation, and Coagulation . Aerosol Sci. Technol. , 4 : 31 – 43 .
  • Whitby , E. R. , McMurry , P. H. , Shankar , U. and Binkowski , F. S. 1991 . Modal Aerosol Dynamics Modeling EPA Report 68–01-7365
  • Wu , C. Y. and Biswas , P. 1998 . Study of Numerical Diffusion in a Discrete Sectional Model and Its Application to Aerosol Dynamics Simulation . Aerosol Sci. Teclmol. , 29 : 359 – 378 .

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