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Aerosol Science and Technology Volume 14, 1991 - Issue 2
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Original Articles

Theoretical and Experimental Particle Size Response of Wafer Surface Scanners

HaeOk S. Lee Particle Technology Laboratory, Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN, 55455
,
SeungKi Chae Particle Technology Laboratory, Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN, 55455
,
Yan Ye Particle Technology Laboratory, Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN, 55455
,
David Y. H. Pui Particle Technology Laboratory, Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN, 55455
&
Gregory L. Wojcik Weidlinger Associates, Los Altos, CA, 94022
Pages 177-192 | Received 15 Nov 1989, Accepted 11 Jul 1990, Published online: 08 Jun 2007

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