References
- Bae , G.-N. , Lee , C. S. , and Park , S. O. ( 1994 ). Measurement of Particle Deposition Velocity toward a Horizontal Semiconductor Wafer by Using a Wafer Surface Scanner . Aerosol Sci. Technol. 21 : 72 – 82 .
- Bird , R. B. , Stewart , W. E. , and Lightfoot , E. N. ( 1960 ). Transport Phenomena , J. Wiley and Sons , New York .
- Bowling , R. A. , and Larrabee , G. B. ( 1989 ). Behavior and Detection of Particles in Vacuum Processes . J. Electrochem. Soc. 136 ( 2 ): 497 – 502 .
- Busnaina , A. , Zheng , X. , and Zhu , X. ( 1993 ). Three-Dimensional Computer Simulation of Gas Flow and Particle Transport in a Horizontal Diffusion Furnace . J. Inst. Environ. Sci. 36 ( 2 ): 25 – 32 .
- Coltrin , M. E. , Kee , R. J. , Evans , G. H. , Meeks , E. , Rupley , F. M. , and Grcar , J. F. ( 1991 ). SPIN (Version 3.83): A Fortran Program for Modeling One-Dimensional Rotating-Disk/Stagnation-Flow Chemical Vapor Deposition reactors , Sandia Internal Report SAND91-8003, Sandia National Laboratories , Albuquerque , NM .
- Cooper , D. W. ( 1986 ). Particulate Contamination and Microelectronics Manufacturing: An Introduction . Aerosol Sci. Technol. 5 : 287 – 299 .
- Cooper , D. W. , Miller , R. J. , Wu , J. J. , and Peters , M. H. ( 1990 ). Deposition of Submicron Aerosol Particles During Integrated Circuit Manufacturing: Theory . Part. Sci. Technol. 8 : 209 – 224 .
- Cooper , D. W. , Peters , M. H. , and Miller , R. J. ( 1991 ). Predicted Deposition of Submicrometer Particles Due to Diffusion and Electrostatics in Viscous Axisymmetric Stagnation-Point Flow . Aerosol Sci. Technol. 11 : 133 – 143 .
- Donovan , R. P. , Yamamoto , T. , Periasamy , R. , and Clayton , A. C. ( 1993 ). Mechanisms of Particle Transport in Process Equipment . J. Electrochem. Soc. 140 ( 10 ): 2917 – 2922 .
- Epstein , P. S. ( 1924 ). On the Resistance Experienced by Spheres in Their Motion through Gases . Phys. Rev. 23 : 710 – 733 .
- Evans , G. H. , and Greif , R. ( 1987a ). A Numerical Model of the Flow and Heat Transfer in a Rotating Disk Chemical Vapor Deposition Reactor . J. Heat Transfer 109 : 928 – 935 .
- Evans , G. H. , and Greif , R. ( 1987b ). Effects of Boundary Conditions on the Flow and Heat Transfer in a Rotating Disk Chemical Vapor Deposition Reactor . Numerical Heat Transfer 12 : 243 – 252 .
- Evans , G. H. , and Greif , R. ( 1988 ). Forced Flow Near a Heated Rotating Disk: A Similarity Solutions . Numerical Heat Transfer 14 : 373 – 387 .
- Friedlander , S. K. ( 1977 ). Smoke, Dust and Haze , J. Wiley and Sons , New York .
- Hinds , W. C. ( 1982 ). Aerosol Technology , J. Wiley and Sons , New York .
- Houtman , C. , Graves , D. B. , and Jensen , K. F. ( 1986 ). CVD in Stagnation Point Flow: An Evaluation of the Classical ID Treatment . J. Electrochem. Soc. 133 ( 5 ): 961 – 970 .
- Liu , B. Y. H. , and Ahn , K-h. ( 1987 ). Particle Deposition on Semiconductor Wafers . Aerosol Sci. Technol. 6 : 215 – 224 .
- Marple , V. A. and Liu , B. Y. H. ( 1975 ). On Fluid Flow and Aerosol Impaction in Inertial Impactors . J. Colloid Interface Sci. 53 ( 1 ): 31 – 34 .
- Marple , V. A. and Liu , B. Y. H. ( 1974 ). Characteristics of Laminar Jet Impactors . Environ. Sci. Technol. 8 ( 7 ): 648 – 654 .
- Otani , Y. , Emi , H. , Kanaoka , C. , and Kato , K. ( 1989 ). Determination of Deposition Velocity onto a Wafer for Particles in the Size Range between 0.03 and 0.8 μm . J. Aerosol Sci. 20 ( 7 ): 787 – 796 .
- Periasamy , R. , Yamamoto , T. , Donovan , R. P. , and Clayton , A. C. ( 1993 ). Particle Transport at Subatmospheric Pressures: Models and Verification . J. Electrochem. Soc. 140 ( 10 ): 2949 – 2951 .
- Peters , M. H. , and Cooper , D. W. ( 1991 ). Approximate Analytic Solutions for Particle Deposition in Viscous Stagnation-Point Flow in the Inertial-Diffusion Regime with External Forces . J. Colloid and Interface Sci. 142 ( 1 ): 140 – 148 .
- Peters , M. H. , Cooper , D. W. , and Miller , R. J. ( 1989 ). The Effects of Electrostatic and Inertial Forces on the Diffusive Deposition of Small Particles onto Large Disks: Viscous Axisym-metric Stagnation Point Flow Approximations . J. Aerosol Sci. 20 ( 1 ): 123 – 136 .
- Rader , D. J. ( 1990 ). Momentum Slip Correction Factor for Small Particles in Nine Common Gases . J. Aerosol Sci. 21 ( 2 ): 161 – 168 .
- Rader , D. J. , and Geller , A. S. ( 1994 ). Particle Transport Modeling in Semiconductor Process Environments . Plasma Sources Sci. Technol. 3 : 426 – 432 .
- Rader , D. J. , and Geller , A. S. ( 1998 ). Particle Transport in Parallel Plate Reactors , Sandia National Laboratories Internal Report SAND98-8202, Albuquerque, New Mexico (in preparation).
- Rader , D. J. , Geller , A. S. , Choi , S. J. , and Kushner , M. J. ( 1994a ). Application of numerical Models to Predict Particle Contamination in Semiconductor Process Environments , in 1994 Proceedings of the Institute of Environmental Sciences 40th Technical Meeting , pp. 308 – 315 .
- Rader , D. J. , Geller , A. S. , Choi , S. J. , and Kushner , M. J. ( 1994b ). Particle Transport in Plasma Reactors , Microcontamination 94 Conference Proceedings , pp. 39 – 48 .
- Rader , D. J. , and Marple , V. A. ( 1985 ). Effect of Ultra-Stokesian Drag and Particle Interception on Impaction Characteristics . Aerosol Sci. Technol. 4 : 141 – 156 .
- Ramarao , B. V. , and Tien , C. ( 1989 ). Aerosol Deposition in Two-Dimensional Laminar Stagnation Flow . J. Aerosol Sci. 20 ( 7 ): 775 – 785 .
- Talbot , L. , Cheng , R. K. , Schefer , R. W. , and Willis , D. R. ( 1980 ). Thermophoresis of particles in a heated boundary layer . J. Fluid Mech. 101 ( 4 ): 737 – 758 .
- Terrill , R. M. , and Cornish , J. P. ( 1973 ). Radial Flow of a Viscous, Incompressible Fluid between Two Stationary, Uniformly Porous Discs . J. Appl. Math. Phys. (ZAMP) 24 : 676 – 688 .
- Waldmann , L. , and Schmitt , K. H. ( 1966 ). Thermophoresis and Diffusiophoresis of Aerosols , in Aerosol Science ( C. N. Davies , ed. ), Academic Press , New York , 137 – 162