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IETE Journal of Research Volume 12, 1966 - Issue 9

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Original Articles

Vacuum Deposition Plant for Thin Film Circuit

K. N. JhaTechnical Physics Division, Atomic Energy Establishment Trombay, Bombay.

N. D. TanejaTechnical Physics Division, Atomic Energy Establishment Trombay, Bombay.

Pages 478-483 | Published online: 21 Aug 2015

Cite this article
https://doi.org/10.1080/03772063.1966.11485352

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REFERENCES

Holland, “Vacuum deposition of thin films” (Chapman & Hall Ltd., London), 1961.
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Keonjian Edward, “Microelectronics”, (McGraw-Hill Book Co. Inc.), 1963, 173–262.
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Hass, George & Thun Rudolf, E., Physics of thin film”, Vols. I and II (Academic Press) 1964.
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Jha, K. N., “Electrical properties of thin film of stainless steel”, presented at the combined 51st and 52nd Session of the Indian Science Congress, Calcutta, 1965.
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Siddal, G., “Vacuum deposition of dielectric films for capacitors”, Vacuum, 9 (1959–60), 277.
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